o

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)

Compact Cylinder/Guide Rod Type Series CQM

Operating Range (mm) Auto switch model Bore size 12 16 20 25 32 40 50 6 10 10 9.5 9.5 9.5 9 11.5 11.5 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9A VL D-A7/A80 7.5 3 5.5 5.5 6 6 7 8 7.5 8.5 4 12 11 10 12 12 13 13 14 14 15 16 17 D-A79W D-F7/F7V D-J79/J79C D-F7W/F7WV D-J79W D-F7BAL/F7BAVL D-F7NTL/F79F 6 6 6 6.5 6.5 7 5 5 5 5 5.5 D-P4DWL Since the operating range is provided as a guideline

Compact

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

Air Cylinder Series CS1

n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 4 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 4 Stations, Voltage: 5 (24 VDC)

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: L-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 1 Station, Voltage: 6 (12 VDC)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 1 Station, Voltage: 12 VDC, Electrical Entry: -, Blanking Plate: -, CE-compliant: -

ZP

6 04 4 06 6 Model M8 x 1 Mounting Bracket Assembly Flat, Ball Joint Type A B C Vacuum inlet direction q Pad dia.

Table of Contents

Note 2) Not used for 6 and 8. Note 3) Not used for 10 and 12. 15-16-8 9 Air Saving Valve Pressure Valve/Flow Valve Series ASR/ASQ Flow Valve: Series ASQ Variable type Fixed type @2 @5 @6 @4 @3 @2 @5 @6 @4 @3 y u i ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type o !5 !3 !5 !2 !4 !1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !

Table of Contents

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

ZP

8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06 04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2

Table of Contents

03 04 q Description No.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.