This is a legacy product, and replaced byVQZ3121-3L1-02

This is a legacy product, and replaced byVQZ3151-3L1

This is a legacy product, and replaced byVQZ115-3L1-CP

V100

R) 1 2 (P A) Flow characteristics Series Valve construction Weight (2) Standard type: 1 W AC High pressure type: 1.0 W Low wattage type: 0.5 W Model (g) Cv Cv b C [dm3/(sbar)] b C [dm3/(sbar)] VQZ100 0.25 VQZ115 0.35 0.46 1.0 0.23 0.87 13 or less 10 or less 22 or less Poppet N.C. valve 25 0.45 VQZ215 0.20 0.17 2.0 0.38 1.7 18 or less 14 or less 34 or less Metal seal N.C. valve 0.80 VQZ235

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

R) 1 2 (P A) Flow characteristics Series Valve construction Weight (2) Standard type: 1 W AC High pressure type: 1.0 W Low wattage type: 0.5 W Model (g) Cv Cv b C [dm3/(sbar)] b C [dm3/(sbar)] VQZ100 0.25 VQZ115 0.35 0.46 1.0 0.23 0.87 13 or less 10 or less 22 or less Poppet N.C. valve 25 0.45 VQZ215 0.20 0.17 2.0 0.38 1.7 18 or less 14 or less 34 or less Metal seal N.C. valve 0.80 VQZ235

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.

Vacuum System Peripherals:

sbar)) Piping specifications VZ110/120 M5 x 0.8 0.11 Body ported VZ312/322 M5 x 0.8 0.53 VZ512/522 1 8 2.8 VZ314/324 1 8 1.2 Base mounted (With sub-plate) VZ514/524 3.0 1 8 1 4 , Body ported Base mounted Model/Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 12.6 (0.7) VQZ235 20 or less 15 or less 53 VQZ200 Metal 10.0 (0.55) VQZ225 18 or less 14 or less N.O. Rubber 12.6 (0.7) VQZ245 20 or less 15 or less Metal 16.2 (0.9) VQZ315 22 or less 17 or less N.C. Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O.

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -

Series: -, Composite Symbol: -, Function: -, Coil Voltage: -, Lead Wire: -, Manual Override: -, IP65 Compliant: -, 1: -, Port Size: -, CE Compliant: -