2

Nipple: KQ2N Applicable fitting D Model L M d Min. port size Weight (g) 4 KQ2N04-99 37 13.3 2.5 2.5 1 6 KQ2N06-99 39 13.3 4 4 2 8 KQ2N08-99 43 14.2 6 6 2 10 KQ2N10-99 49 15.6 7.5 7.5 4 12 KQ2N12-99 52 17 9 9 3.3 16 KQ2N16-99 57 17 13 13 4.8 2 x Applicable fitting D d L M M Fittings Reducer Nipple: KQ2N KQ2 Applicable fitting b Applicable fitting Model L M1 M2 d Min. port size Weight (g) a

AS-FG/ASD-FG

Steel Series AS-FG Dimensions/Elbow Type M5 type U10/32 type Metric size Inch size Model d T Weight g H D1 D2 L1 L2 L3 L4 A Model d T Weight g H D1 D2 L1 L2 L3 L4 A Max.

SQ1000/2000

RD SD EX140-SMJ1 131.5 [Single, double, dual 3 port valve] 147 (3 position) 2-M4 clamp screw 24V 0V +24V 24G DA DB DG FG (131.5) A A A B A B A B A B A B A B B RATE 56 35 5.5 A 4 STATION No. 0 10.4 5.5 37.6 53.6 B 2 18.5 1 1 Approx. 12 Approx. 12 EXH outlet D side U side Stations 1 2 3 4 5 6 7 8 n C10: EXH port For top ported Approx. 10 C10: SUP port R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62

LEC-OM069xx

5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1

e

(96.7) 35.5 132.2 60 110.8 (60) D-m D-m 94 96.7 35.5 100 Workpiece mounting center line Motor 60 102 60 42 E-MY E-MY (60) 60 108.7 163 170 67 60 34 31.8 48.7 4 x 9.5 counterbore depth 5.4 5.5 through 19.5 5 7 22.2 37 6 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 7.1 (Max. 10.1) 17.5 198 + Stroke Encoder cable on actuator side (4 wires) Noise filter Note) 2 x 4 x square nut M5 x 0.8

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Metric size Inch size ASD 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings AS Stainless steel specifications (Stainless steel 303) AS-FE KE AS-FG AS-FG Use 1/8" tube. Made to Order AS-FP AS-FM Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AS-D AS-T Ex.)

Table of Contents

D-B59W -X 4 4 4.5 5 D-H7/H7W/ D-H7NF/H7BAL HS HS HS HS HS 20 2024.5 27 62 72 27.5 7 8.5 9 10 D-H7C 25 27 29.5 64.5 74.5 30 8 9 9 9 D-A3/D-A44 9 10 9 10 Data 4 4 4.5 5 D-G39/D-K39 D-G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.

SY

4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND X10 X1 1 2 3 4 5 6 7 8 OFF Terminal block LED description Note Cable wiring 24V 24V 0V D G D G 0V 24V 24V 0V A B SG FG 0V 24V 0V +24V 24G DA DB FG DG Detail LED description POWER COMM Lights up with power input to SI unit Lights up when transmission is normal ALARM Lights up when transmission is abnormal Detail LED description Detail LED description

Metal Seal/Rubber Seal Series VQ Body Ported

D side U side See page 2-4-91 for cylinder port fittings.

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Metric size Inch size ASD 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings AS Stainless steel specifications (Stainless steel 303) AS-FE KE AS-FG AS-FG Use 1/8" tube. Made to Order AS-FP AS-FM Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AS-D AS-T Ex.)

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSGl-M5 M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSGl-U10/32 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSGl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSGl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG AS-FG R NPT Note 1) Sealant

JXCx-OMT0005CN

Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 100 2 ALM FG READY 3 0 OUT 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 101 3 4-7 4byte 8-9 2byte 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 3 4-7 4byte