Series SV

Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or less

SV

(Values at the initial period) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center (A) 4 (B) 2 Response Time 5 (EA) 1 (P) 3 (EB) Response time (ms) (at the pressure of 0.5 MPa) 3 position pressure center Type of actuation SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 11 or less 25 or less 28 or less 40 or less 2 position single 10 or less 17 or less 26 or less 40 or less 2 position double 5 (EA) 1 (P

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Default settings) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Response Time Response time (ms) (at the pressure of 0.5 MPa) Actuation type 10-SV2000 25 or less 17 or less 29 or less 33 or less 10-SV3000 28 or less 26 or less 32 or less 10-SV4000 40 or less 40 or less 82 or less 10-SV1000 11 or less 10 or less 18 or less

Series: 3 (VFA3000), Stations: 08, Thread: N (NPT)

Series: 3 (VFA3000), Stations: 02, Thread: N (NPT)

Series: 3 (VFA3000), Stations: 04, Thread: N (NPT)

Series: 3 (VFA3000), Stations: 06, Thread: N (NPT)

Series: VFA3000, Stations: 08, Thread: NPT

Series: VFA3000, Stations: 02, Thread: NPT

Series: VFA3000, Stations: 04, Thread: NPT

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Example) VV5F3-40-052-021 pc. (Manifold base) VF3140-1G2 pcs. (Valve) VF3240-1G2 pcs. (Valve) DXT031-38-1A1 pc. (Blanking plate assembly) VV5F3-60 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

MHL2

0.2MPa 40 40 0.2MPa 0.2MPa 0.2MPa 20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

SFOD-OMT0009CN

AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

Series: 5 (VFA5000), Stations: 05, Thread: N (NPT)

PFxx-OMJ0005CN

60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 290 L/min 295 L/min 095 L/min 4.60 V 18.4 mA 70% 30% 280 L/min 284 L/min 084 L/min 4.20 V 16.8 mA 60% 40% 420 mA 15V [mA] [V] -76No.PF-OMJ0005CN-I Revision

LECP6_C

PLC No. 1-051 PLC 15ms 30ms 2(P.40) No.

JXCx-OMT0001CN

(1) . 40 (2) . 41 7.

LECA6_C

B RESET PLC 15ms30ms 2(P.40) 49 - +JOG 1-052 B RESET +1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) 1 [] A [a ] C RESET 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESETS VON (1) D 50 - ON (M24V) 1-145 RESETS VON (1) D 1-146 RESETS VON (1) D (C24V) RESETS VON (1) 1-147

SFOD-OMT0005CN

B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.