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Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

A

6 10 21.5 8-32UNC 12 0~0.002 -0.4 ~ -0.2 5 3/16 16 7 6.3 RCS-01 6 10 21.5 8-32UNC 12 0~0.002 6.4 -0.3 ~ -0.1 3/16 16.6 21 10 12 RCD-015 12 6 12 28 8-32UNC 16 0~0.002 6.4 -0.3 ~ -0.1 3/16 25 14 12 RCS-015 6 12 32 8-32UNC 16 0~0.002 8 -0.4 ~ -0.2 5/16 21 25 11.5 10.3 RCD-02 16 6 16 34 10-32UNF 20 0~0.002 8 -0.4 ~ -0.2 5/16 25 11.5 10.3 RCS-02 6 16 34 10-32UNF 20 0~0.002 10 -0.4 ~ -0.2 3/8

A_HEC-OM-J017

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR 4-2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

Table of Contents

12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 11 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

VFS

Symbol 02 03 A, B P D Nil D side mounting None 01T, 10 1 4 Rc Rc Rc M Mixed 3 8 1 2 U 01C, 01F U side mounting Stations Symbol Porting specifications (A, B) 02 Passage 2 stations Symbol R1, R2 P 10 10 stations 1 Side 2 Bottom Common Common Base type 01T, 10: 2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

V

0.3 VX2340-02 6 1.05 19 0.15 0.08 0.13 0.08 0.15 0.1 0.08 VX2250-02 8 1.7 31 Water 0.2 0.2 0.17 0.2 0.2 0.14 0.2 VX2350-02 8 1.7 31 Oil Air 0.08 0.03 0.08 0.03 0.08 0.05 0.03 VX2260-02 10 1.9 34 3 3 0.1 0.07 0.1 0.07 0.1 0.08 0.07 VX2360-02 10 1.9 34 Steam 0.05 2 1.5 1.7 1.5 1 1.2 1.2 VX2220-03 3 0.33 6 Water 3 3 2.5 3 1.7 2 VX2320-03 3 0.33 6 0.75 0.35 0.6 0.35 0.75 0.35 0.3 4.5 VX2230

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 01 1 8 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 10-SY7000 02 02 03 1 4 2 position

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

TF H TT TV 4TF TF+0.10 0 TV TX 20 25 32 40 38 8 29 14 11 10 5.5 25 3.2 (35.8) Up to 125 Z + Stroke TZ 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) Up to 200 ZZ + Stroke 54 12 40 20 15 10 6.6 35 4.5 (49.4) Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) Up to 200 Clevis style: CG1DN Z 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TW TX TY TZ Z ZZ Z ZZ Z ZZ ZZ CD hole H10 Axis

SX

2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

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63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

Air Cylinder

17 32 12 26 0 0.033 13 10.5 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 122 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 154 With Rod Boot (mm) B3 e f h l ZZ Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

SY

x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 6 x 1m AS3001F-06 (Cv = 0.36) 10 x 1m AS4001F-10 (Cv = 0.89) 12 x 1m AS4001F-12 (Cv = 1.17) 6 x 1m AS3001F-06 (Cv = 0.36) 12 x 1m AS4001F-12 (Cv = 1.17) AN200-02 (Cv =

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

70pvpump

to 101 kPa 100 to 100 kPa 10 to 100 kPa 50 to 500 kPa 0.1 to 1 MPa 10 to 101 kPa 101 to 101 kPa 10 to 100 kPa Set pressure range 0.2 to 2 kPa 12 to 24 VDC (Ripple p-p 10% or less) Voltage 0.5% F.S. or less (0 to 50C) Temperature characteristics 0.1% F .S. or less Repeatability Hysteresis mode: Variable Window comparator mode: Fixed (3 digits) Hysteresis mode: Variable Window comparator mode

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.