240

Cylinder port 4 x M4 x 0.7 Depth 6 6 27 5.5 21.5 26 52.5 53.5 25 27 25 6.5 5.5 6.5 5 NS 42 + Stroke 56 + Stroke 16 25 10 14 12.5 17 12 10 + Stroke 4 x M4 x 0.7 Depth 6 17 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

MXH Series Compact Slide

4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 Stroke (mm) LT NS LA LB J 5 14 49 4 10 10 49 14 10 4 15 24 59 4 20 20 59 24 20 4 25 30 69 4 30 30 69 30 30 4 40 45 20

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

NS: OFF IP address is not setting. Set IP address. Refer to "IP address setting switch" (page 20) for details. Check the following and restart. Signal line is connected from PLC. The communication speed of PLC and SI unit is EtherNet/IPTM communication is not established. 13 NS: Green LED is flashing appropriate. Wire the communication line away from the noise source.

EX600-SEN_eng

Green NS LED is flashing Red PWR(V) LED is On Red MS LED is flashing Red NS LED is flashing Red ST(M) LED is On Red PWR LED is On Green MS LED is On Green NS LED is On Green LEDs are On Red MS LED is On Red NS LED is On LED display The power supply for control and input is Off, or IP address is not set.

EXxx-OMS0026CN

: IP IP [IP ]( 19 ) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.

MU

NS + Stroke Width across flats B1 Width across flats KA 4-ND through Bottom hole diameter NE 8-NC counterbore S + Stroke ZZ + Stroke Rod End Female Thread BS + Stroke S + Stroke ZZ + Stroke Dimensions except mentioned above are the same as male thread type.

EX600-SDNA_eng

Then, Red/green NS LED is flashing alternately For use in Pollution Degree 2 Environment (UL508) Pollution degree Solenoid valve with lamp and circuit of protection of surge voltage of 24 VDC 1.5 W (SMC) Connected load Green MS LED is On and red NS LED is On Red/green ST(M) LED is flashing alternately Control and input Green MS and NS LEDs are both On A unit other than the SI unit has been

MU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NS + Stroke Width across flats B1 Width across flats KA 4-ND through Bottom hole diameter NE 8-NC counterbore S + Stroke ZZ + Stroke Rod End Female Thread BS + Stroke ZZ + Stroke Dimensions except mentioned above are the same as male thread type.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 i MS, NS Communication status LED Displays the status of the EtherNet/IPTM communication t o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !0 MOT z Motor power connector (6 pins) !8 @1 !1 ENC x Encoder connector (16 pins) Axis 2: Connect the actuator cable. !2 MOT x Motor power connector (6 pins) !9 @0 !3 !4 y !

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

resistance Impact resistance Noise resistance IP65 0 to 50C Resistance 1000 VAC for 1 min. between external terminal and case 50M or more (500 VDC Mega) between external terminal and case 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration in each X, Y, Z direction for 2 hrs, whichever is smaller. 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns

Digital Flow Switches Series PF2A

(de-energized) 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Status LEDs Response time Hysteresis Power supply voltage Enclosure Operating temperature range Withstand voltage Insulation resistance Vibration resistance Impact resistance Noise resistance Note 1) For digital flow switch with unit switching function.

IP Address Setting Tool (Interactive Type)

LED check Refer to fault EtherNet/IPTM device NS No. 1 LED is ON or flashes () Yes No EtherNet/IPTM device NS Refer to fault Scan is not No. 2 LED is OFF available Refer to fault IP address is not No. 3 held Green ON, Green flashes, Red ON, or Red flashes. -13No.EX-OMV1026-B Troubleshooting list Fault No.1 Problem Possible cause Investigation method Countermeasures Set the IP address switch

Series PF2W Digital Flow Switch For Water

mode: Variable (can be set from 0), Window comparator mode Note 6): 3-digit fixed 12 to 24 VDC 10% Enclosure Operating temperature range Withstand voltage Insulation resistance Noise resistance IP65 Environment 0 to 50C 1000 VAC for 1 minute between terminals and housing 50 M or more (500 VDC measured via megohmmeter) between terminals and housing 1000 Vp-p, Pulse width 1 s, Rise time 1 ns

Multi-Axis Step Motor Controller

2 i MS, NS Communication status LED Displays the status of the EtherNet/IPTM communication t o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !0 MOT z Motor power connector (6 pins) !8 @1 !1 ENC x Encoder connector (16 pins) Axis 2: Connect the actuator cable. !2 MOT x Motor power connector (6 pins) !9 @0 !3 !4 y !

EX600-WEN_WSV.eng

Wireless communication connection status PB72, 02231, Espoo, Finland W-NS Restorable error is detected. (LED flashes when more than one diagnostic information item is detected.)

MXU

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

EX260-SDN_eng

MS status Description NS status Installation Green On Green On On-line state, The device has connections in the established state.