SMC Corporation of America
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) Circulating fluid system Cooling water system Electrical system 2.0 (at 10C) 1.0 (at 20C) 2.0 (at 20C) 4.0 (at 20C) 8.0 (at 20C) 2.0 (at 20C) 8.0 (at 20C) 4.0 (at 10C) 8.0 (at 10C) 2.8 (at 10C) 3.2 (at 10C) 2.3 (at 20C) 2.6 (at 20C) 2.8 (at 20C) 3.0 (at 20C) 2.3 (at 20C) 3.3 (at 20C) 3.6 (at 10C) 5.9 (at 10C) Cooling capacity Note 3) (kW) Heating capacity Note 3) (kW) Temp. stability Note

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Right Left Rear Front w q Parts List e Part no. Applicable model Weight [kg] No.

Handling Caution q All loads to piston rod must be applied in axial direction only. Unavoidable side loads to rod end must be less than the values in the graphs. Cylinder installation requires accurate alignment.

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Refrigerant R134a (HFC) IDU E Construction (Air/Refrigerant Circuit) IDF190D IDF240D w Air cooler q Air re-heater Compressed air inlet High temperature humid air from the air compressor passes through the air re-heater q and is pre-cooled by dehumidified cool air. Then, it is cooled to the specified temperature by the air cooler w using the evaporation heat of refrigerant.

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = 1400 [W]

In the case of liquids: P Q = 53 Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232 Kv P (P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 57 Solenoid

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

3 u q @3 @4 t r !4 y Single acting/Normally closed MHR !9 @0 @1 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Component Parts Misc. Material No. Description Note Material No. Description Note Aluminum alloy Chloroprene rubber CR Hard anodized q Body DStainless steel Fluoro rubber FKM Dust cover w !

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900 (968) 97 Refrigerant R407C (HFC) IDFA100F/125F/150F

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

MLGC CNA Taper ring Steel ball CB P q f CV/MVG R R CXW CXS CXT MX MXU MXS MXQ Standard manual override lock release MXF MXW Even if air is cut or exhausted, lock release is possible using a wrench. When override is released, lock is engaged again as a fail safe.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

temperature: 95F (35C) 600 1200 Ambient temperature: 86F (30C) 500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity (Thermo-con Outlet) The pressure on the y-axis shows

Refrigerant AFF AM UL certified product Improved corrosion resistance with the use of stainless steel, plate type heat exchanger (IDFB4E to 75E) AMD Power supply voltage: Single-phase 115 VAC (60 Hz) 230 VAC (60 Hz) Three-phase 460 VAC (60 Hz) AMH AME Air flow capacity SCFM (m3/h [ANR]) Series Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(10C

Applicable power supply cable model HRS-S0074 HRS-CA002 HRS-CA003 Power supply connector for accessory w q Parts List No. Description q Retaining clip w Holding screw 22 HECR Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to the back cover for safety instructions.