XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XM, XY

Angle type M9N A 25 In-line type q w e r t y u w Flange type XMD q Flange size Size Symbol Type Applicable flange size XMD XYD 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) KF (NW) K (DN) CF 25 40 50 63 80 Nil D C XYD D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 Nil e Pilot port direction Rear flange surface XMD Rear flange surface XYD Symbol Pilot port direction Flange side Left flange surface

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

This is a legacy product, and replaced byXLA-25-2M9// XLA HIGH VACUUM VALVE. HIGH VACUUM VALVE, MAG/NO SW. VACUUM SERIES. XLA NO SIZE RATING. 1.27484 lb. 2X.

Please contact us for the latest version.sales@ocaire.com, EXTERNAL SEAL FOR XLA-25, VACUUM SERIES, XLA NO SIZE RATING, .01034 lb

This is a legacy product, and replaced byXLA-25-2M9//, HIGH VACUUM VALVE, MAG/NO SW, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.27484 lb

1

Cable 0.3 mm2 x 25 cores O.D. 1.4 Lead wire color Dot marking Terminal no.

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Yes, for flange sizes 25, 40, and 50, it is available as a special order.
The auto switch is a heat-resistant type auto switch. Contact SMC for other flange sizes.

Please contact us for the latest version.sales@ocaire.com, BODY FOR XLA-25, HIGH VACUUM VALVE

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

- Raw Material, Seal Material: R2 [CHEMRAZ® (SS630)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.