Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

RSH

Impact Endurance 500m/s (About 50G) XYZ direction 10 times Enclosure IEC standard IP67 (JEM standard IP67G Drip proof, Oil proof) Note 1) At load current 100mA and cord length 2m Note 2) Between case and whole charging part Dimensions E2E-X1C1 (RSH20/32) 25 17.5 8 15 * Indicator light * Polyvinyl chloride round cord (Oil and vibration proof) 0.14mm2 X 3 wire O.

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G), X,

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G), X,

RS2H-OM0045P

E2E-X2D1-N () DC1224V(DC1030V),(P-P) () 0.8mA 1.5kHZ () 3100mA (LED) (LED) -2570() 3595%RH 1 2 3V AC1000V 1055HZ1.5mmXYZ 2h 2(50G) XYZ 10 500m/S IEC IP67(JEM IP67G ) 1)100mA 2m 2) 8-2. -19-19-19-90 -19-19-1920 - 1. 2. 3. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 1. 2. 1. 2. 3. 1. 2. 3. () 4. 5. 1. 2. 1. 2. 1. ON (ON) 1. , 2. ON 3. 60 4.

Heavy Duty Stopper Cylinder Series RSH/RS1H

Indicator light Detection indication (Red LED) Set operation indication (Green LED) Lever detection switch 25 to 70C (No freezing) Ambient temperature Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G

RSH/RS1H

Indicator light Detection indication (Red LED) Set operation indication (Green LED) Lever detection switch 25 to 70C (No freezing) Ambient temperature Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G

SY

Caution Interface Regulators Specifications ARBY3000--2 A1 B1 ARBY5000--P-2 ARBY5000--2 A1 B1 ARBY3000--P-2 Interface regulator model Applicable solenoid valve model Regulated port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 x 0.8 46g (with 05), 50g

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.