ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

IDX-OM-U021

0.151.0 / K 0.151.6 () 245 (85%) 50Hz 16 20.1 25 (ANR) 1) 60Hz 18.8 23.7 30 3/min m 50Hz 16.7 20.9 26 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 3) 10 (50/60Hz) kW 8.0/9.0 10.0/11.5 12.0/15.0 () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.9/3.5 4.0/4.7 4.0/4.8 (50/60Hz) (50/60Hz) A 10.5/11.5 15.4/15.6 15.7/16.0 5 ) A 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

IDX-OM-Z004

23.7 30 3/min 50Hz 16.7 20.9 26 m 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 10 3) 6) m 3/h 1.29 / 1.56 1.74 / 1.98 2.16 / 2.53 (50/60Hz) 32 7) MPa 0.070.1 (50/60Hz) 8) kW(RT) 9 (2) 11.5 (2.5) 14.5 (3.2) () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.4 / 2.8 2.8 / 3.3 (50/60Hz) (50/60Hz) A 8.5 / 9.0 10.2 / 11.5 5 ) A 20 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

ZQ-OM01401

. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa] 10 to -105 -105 to 105 [kPa] 500 [kPa]

Magnet Gripper for Collaborative Robots

Parts description of the magnet gripper MHM-25D-X7400A-DTP-(N/P) Hexagon socket head cap screw M6x23 Auto switch D-M9(N/P) Magnet gripper Adapter plate Hexagon socket head cap screw M4x35 Exhaust throttle valve with silencer ASN2-M5-X937 Positioning pin 3x6 3 port solenoid valve V114-5LU Hexagon socket head cap screw M4x12 ISO9409-1compliant Conversion cable Hexagon socket head cap screw

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: (None), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: (None), Exhaust Solenoid Valve: V124-5LU-M5