Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet. 34 Series SYJ5000 Flat Ribbon Cable Manifold Multiple valve wiring is simplified through the use of the flat cable connector.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

By combining the reference points of these two pieces of data, you will be able to see the CAD data of the SY5140-5LZ-02.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

IDX-OM-U021

0.151.0 / K 0.151.6 () 245 (85%) 50Hz 16 20.1 25 (ANR) 1) 60Hz 18.8 23.7 30 3/min m 50Hz 16.7 20.9 26 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 3) 10 (50/60Hz) kW 8.0/9.0 10.0/11.5 12.0/15.0 () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.9/3.5 4.0/4.7 4.0/4.8 (50/60Hz) (50/60Hz) A 10.5/11.5 15.4/15.6 15.7/16.0 5 ) A 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

IDX-OM-Z004

23.7 30 3/min 50Hz 16.7 20.9 26 m 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 10 3) 6) m 3/h 1.29 / 1.56 1.74 / 1.98 2.16 / 2.53 (50/60Hz) 32 7) MPa 0.070.1 (50/60Hz) 8) kW(RT) 9 (2) 11.5 (2.5) 14.5 (3.2) () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.4 / 2.8 2.8 / 3.3 (50/60Hz) (50/60Hz) A 8.5 / 9.0 10.2 / 11.5 5 ) A 20 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.