Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: w/Light & Surge Voltage Suppressor

Parallel Type Air Gripper Series MHZ

Flat Type Fingers [3] 3.5 2 7.5 7.5 +1.2 0.8 +0.2 0 2 When closed 1 When open 5 3.5 Note) To mount attachments, use M2 hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws. 7.2 4-M2 x 0.4 thread depth 3 Attachment mounting thread 0 -0.05 4 Weight: 25g Specifications and dimensions other than the above are the same as the basic type. 7 Parallel Type

KJ

2 !

KR

Connection thread Note 1) D1: Max. diameter Note 2) ( ): Values for soft nylon Union Tee: KGT Effective area (2) (mm2) Applicable tubing O.D.

Stainless Steel One-touch Fittings Series KG

C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No. L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Series M Miniature Fittings M3, R(PT) 1/8, M5

orifice: 0.6mm 2 Weight: 0.9g Universal tee: M-3UT Universal elbow: M-3UL Effective orifice: 0.6mm 2 Weight: 1.6g Effective orifice: 0.6mm 2 Weight: 1.4g Gasket: M-3G Plug: M-3P Nipple: M-3N Effective orifice: 0.9mm 2 Weight: 0.6g Weight: 0.005g Weight: 0.5g 303 Stainless Steel Series R(PT) 1 8 Barb fitting for nylon tube, soft tube: M-01A -4, -6 Weight (g) 6.4 6.6 6.5 6.7 Effective orifice

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Made to Order

Specifications: Same as standard type Applicable Hose Nipple Type 3 x M4 x 0.7 2 x Hexagon socket head set screw Applicable bore size (mm) Symbol Function Hose nipple part no. H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

HRX-OM-S004

Press the 2 sec.

HRX-OM-W032

Press the 2 sec.

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R016

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)

Bernoulli Gripper

4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece [mm] ZNC60m ZNC80m 30 70 0.5 [MPa] 0.5 [MPa] 60 25 0.4 [MPa] 0.4 [MPa] 50 Lifting force [N] Lifting force [N] 20 0.3 [MPa] 0.3 [MPa] 40 15 0.2 [MPa] 0.2 [MPa] 30 0.1 [MPa] 0.1 [MPa] 10 20 5 10 0 0 0 3 2.5 2 1.5 1

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !