End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

CATALOG

ISE4L-01-25L ISE4-01-25L PNP Output ZSE4-01-65L ISE4L-01-65L ISE4-01-65L Analog Output ZSE4-01-26L ISE4L-01-26L ISE4-01-26L Operating Pressure Range +10 to -101KPa (1.5~15PSI) -0.1~1 Bar (-1.5~15PSI) -1~10 Bar (-1.5~145PSI) Minimum Displayed Unit mmHG: 5 kgf/cm2 = 0.01 kgf/cm2 = 0.1 PSI: 0.1 PSI: 0.1 PSI: 1 Bar: 0.01 Bar: 0.01 Bar: 0.1 kPa: 1 kPa: 1 MPa: 0.01 Switch Indicator ON (green light

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L 10211122102111226.5 6.5 10211122102111226.5 6.5 10211122102111226.5 6.5 10211122102111228.5 8.5 755 CQS 2122CQS/ 1011Compact Cylinder Mounting Bolt for CDQS Mounting method: Mounting bolt

CA2

Dd9 L Clevis Knuckle CDP-2A 40 10 0.040 0.076 4 Polished round 10 3 46 3 x 18l 38 C76 CDP-3A 40, 50, 63 50 12 0.050 0.093 4 Polished round 12 3 55.5 3 x 18l 47.5 C85 CDP-4A 63 16 0.050 0.093 5 Polished round 16 4 71 4 x 25l 61 l CDP-5A 80 18 0.050 0.093 5 Polished round 18 4 76.5 4 x 25l 66.5 C95 CDP-6A 100 80 20 0.065 0.117 5 Polished round 20 4 83 4 x 30l 73 CDP-7A 100 25 0.065 0.117

smcmaintenancepartslist

Hexagon socket head cap screw Nominal size of wrench Bore size (mm) 125, 140, 160 M8 x 1.25 x 25L 6 356 2 Series CNS Replacement Procedure of Seal 3. Assembly b. Remove lock unit by applying compressed air over 0.3 MPa to lock release port. 3-1. Before assembling cylinder, be sure to clean each part to remove dust. 3-2.

CL

Used cotter pin 3 X 18l 3 X 18l 4 X 25l 4 X 25l 4 X 30l 4 X 36l Used flat washer Part No. Clevis Knuckle CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A Dd9 L m Part No. D C B H d Tube I.D.

I

ISE4L-01-25L ISE4-01-25L PNP Output ZSE4-01-65L ISE4L-01-65L ISE4-01-65L Analog Output ZSE4-01-26L ISE4L-01-26L ISE4-01-26L Operating Pressure Range +10 to -101KPa (1.5~15PSI) -0.1~1 Bar (-1.5~15PSI) -1~10 Bar (-1.5~145PSI) Minimum Displayed Unit mmHG: 5 kgf/cm2 = 0.01 kgf/cm2 = 0.1 PSI: 0.1 PSI: 0.1 PSI: 1 Bar: 0.01 Bar: 0.01 Bar: 0.1 kPa: 1 kPa: 1 MPa: 0.01 Switch Indicator ON (green light

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Speed Controller with One-touch Fittings

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model AS-10L AS1002FS AS-20L AS2002FS AS-25L AS2052FS AS-30L AS3002FS AS-40L AS4002FS Part no.

Cylinder with Lock

D H11 E FB L4 MF R TF TG 0.2 UF Screw size 32 F5032 30 50 7 5 10 32 64 32.5 79 M6 x 20L 40 F5040 35 55 9 5 10 36 72 38 90 M6 x 20L 50 F5050 40 70 9 6.5 12 45 90 46.5 110 M8 x 20L 63 F5063 45 80 9 6.5 12 50 100 56.5 120 M8 x 20L 80 F5080 45 100 12 9 16 63 126 72 153 M10 x 25L 100 F5100 55 120 14 9 16 75 150 89 178 M10 x 25L D TG R E FB * Supplied with 4 mounting screws UF TF TG MF Single clevis

Compact and Lightweight

AS-25L ZH13/15DA Applicable thread size: M4 AS-30L ZH18/20DA Applicable thread size: M4 L-bracket wDIN Rail Mounting Bracket1 Part no. Applicable model Note Quantity AS-10D ZH05/07/10DA Applicable thread size: M3 1 pc. AS-25D ZH13/15DA Applicable thread size: M4 AS-30D ZH18/20DA Applicable thread size: M4 1 DIN rail is not included. It should be provided by the customer.