3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *2 Fixed unit: kPa, MPa *1 Can be switched to auto-shift or copy function r Piping specification t Option 1 y Option 2 Symbol Description Symbol Description Nil Without lead wire Symbol Description Nil None M5 female thread ZS-46-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 * For

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

VQZ1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD How to Order Valve Manifold Assembly (Example) U side VQZ2150-5L Stations VQZ2250-5L VQZ2350-5L D side VV5QZ25-05C6C1 set (C kit 5 stations manifold base) VVQZ2000-10A-51 set (Blanking plate assembly) VQZ2150-5L1 set (Single solenoid part no.)

Proposals for Energy Saving

Air operated type 2 Applicable series Symbol 03 Port size Rc 3/8 Pressure 1.0MPa 0 VBA2100/2200 VBA4100/4200 04 Rc 1/2 Related products Model Description Note VBA1110/1 VBA2100/2200 VBA4100/4200 VBA4200-04 AM250-02 AM450-04, 06 AM550-06, 10 Page 4.6-1 (Best Pneumatics No.4) Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more noise reduction Exhaust cleaner Air operated type VBAT05 (5l

Digital Flow Switch

.) *4 Fixed unit: Instantaneous flow: L/min Accumulated flow: L XY 2 outputs (NPN/PNP switching type) + Copy function Sensor connector C *1 Can switch between 1 to 5 V and 0 to 10 V *2 Can be switched to external input or copy function Option 1 Option 2 Symbol Description Nil Without lead wire Symbol Description Nil None ZS-46-5L ZS-46-A1 A1 Bracket A (Vertical mounting) L Power supply/

ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

PSE540/560

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Wiring Caution M3 x 5L 1. Connection and removal of sensor connector Hold the lever and connector body with two fingers and insert the connector straight into the pin until it is locked with a click sound.

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF VFR How to Order Valve Manifold Assembly (Example) VP7 VP4 VQZ2150-5L VQZ2250-5L VQ U side 2 3 4 5 VQZ2350-5L VQ4 VV5QZ2505C6C1 set (C kit 5 stations manifold base) VVQZ200010A-51 set (Blank plate assembly) VQZ21505L 1 set (Valve P/N single solenoid) VQZ22505L 2 set (Valve P/N double solenoid) VQZ23505L 1 set (Valve P/N 3 position) VQZ D side 1 VQD VZS Prefix mark to valves etc. to

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

MLU

MLU ML1C DMounting of Auto Switch -X Except D-P5DWL D-P5DWL 20Data Auto switch mounting screw Hexagon socket head cap bolt With SW M3 x 0.5 x 5l M3 x 0.5 x 6l Auto switch Switch mounting bracket With SW, M3 x 0.5 x 14l Round head Phillips screw 8 x 3.3 x t0.8 Flat washer Auto switch Auto switch mounting nut Auto switch mounting nut Tightening torque of auto switch mounting screws should

HRX-OM-M090

Stop Ensure that the circulating fluid flow is 5l/min.or more. Check the heat load are within the specified range. AL06 High circulating fluid discharge pressure Stop Check the user's piping for bends, squash and foreign matters. AL07 Abnormal pump operation Stop Restart and check the pump is operating.

HRX-OM-R016

Stop Ensure that the circulating fluid flow is 5l/min.or more. Check the heat load are within the specified range. AL06 High circulating fluid discharge pressure Stop Check the user's piping for bends, squash and foreign matters. AL07 Abnormal pump operation Stop Restart and check the pump is operating.

Air Fittings & Tubing

Effective area (mm2) Weight (g) lI A B C D E F G H 12 13.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 5.5 6 15 16 7 8 1.4 4.5 6.6 2.4 15.5 17.5 M-5HLH-4 M-5HLH-6 SM5B, #20/#21 Elbow: M-5L Tee: M-5T Weight: 3.5g Weight: 4.2g Universal elbow: M-5UL Universal tee: M-5UT Effective area: 2.4mm2 Weight: 5.3g Weight: 4.8g Effective area: 2.4mm2 Extension fitting: M-5J Nipple: M-5N Weight: 1.5g Effective area:

V100

VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

KJ

-4 4/2.5 x M5 4/2.5 x R For soft nylon and polyurethane tubing M-5P 1 8 R P. 59 1 8 6/4 x M5 6/4 x R Gasket M-01AU-6 P. 56 M-5HLH-6 P. 58 1 8 To seal M5 thread Material: PVC M-5G1 Hose nipple M-01H-4 Elbow For nylon, soft nylon and polyurethane tubing 4/2.5 x R P. 59 1 8 M-5AL-6 M-5ALH-6 M-5HL-4, 6 M-5HLH-4, 6 Gasket (H) One-sided 90 elbow M5 female x M5 female Material: Nylon66 GF30% M-5L