KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

S Couplers Series KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Made to Order

D-M9BW: 2 pcs.

1

With X417 (2 pcs.)

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

ZZ CXSW32 SS 14 S 16 30 8 16 14 8 Z (30) 38 2-R3.5 8 36 1 2-M10 x 1.5 x 8l (Hexagon socket head set screw) 2-6.9 through 2-11 counterbore depth 6.3 96 1 5 6.3 0.2 75 98 76 44 75 2-R3.5 8 18 16 4-M5 x 0.8 thread depth 8 4-M6 x 1 (Through-hole) 2-M8 x 1.25 x 23 l, 2-M8 x 1.25 (Hexagon bolt) (Hexagon nut) 2-M8 x 1.25 x 16l (Hexagon socket head cap screw) (Z) 8-M5 x 0.8 thread depth 7.5 (Opposite

This is a legacy product, and replaced byXLC-40-2 XLC HIGH VACCUM VALVE. HIGH VACUUM VALVE. VACUUM SERIES. XLC NO SIZE RATING. 2.89186 lb. 2X.

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

Cylinder with Lock

4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 10 D-A5m D-A6m n 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 10 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 20 15 D-A59W n 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 25 20 D-F5NTL n 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6,

HRX-OM-X071

Fig 2-2 Part number of product(2/2) 2.1 Model Number of Product HRR Series 2-2 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts 2.2.1 HRR050-A-20/40(Air cooled type) In the case of option Z, without bypass valve Fig 2-3 Names of the parts Table 2-1 Accessory list 2 copies Operation manual (English 1 copy/ Japanese 1 copy) Power supply connector 1 pc.

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

MGP

2 !3 !

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

MLGP

Step 2 1. For vertical mounting 2.

MLGP

Step 2 1. For vertical mounting 2.

MK

2 !3 25, 25: 2 Qty.

MK

2 !3 No. !4 !5 !6 !7 !8 !

MLGP

Step (2) 1.

MLGP

Step (2) 1.

MHC2

MHC2-10l MHC2-16l SMH03, #1 (#1+#9) SMH03, #2 (#2+#9) 2.6-3 Angular Style Standard Series MHC2 MHC2-20l Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. MHZ2 MHZJ2 When auto switch is used, through hole mounting type is not available.