Air preparation filter

Assembly and replacement procedure Nominal No. of the tool Body size Bolt Auto drain Lock nut Nominal size Size Width across flats 70D 6 M8 24 80D 8 M10 90D 7-1. Bracket assembly A) Mount the bracket to the product. B) Mount a washer to the 2 mounting bolts respectively, and hold the bracket to the product. Tightening torque is 6.2Nm for 70D, and 12.5 Nm for 80D and 90D.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material:

High vacuum valve, XL, HIGH VACUUM VALVE, 0.00000 lb

A

MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

CATALOG

2 4H9 0~0.03 4 8 NOTE) FOR MHS2 AND MHS4 DIMENSIONS AND MORE TECHNICAL INFORMATION, REFER TO CAT:E246 MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

Valve Type: XYD (In-line Type, 2 State Control, Single Acting, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K (DN)], Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (or None in the Case of No

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

CA2

(Example) 40D-A3C-4 50D-A3C-5 63D-A3C-6 80D-A3C-8 100D-A3C-10 When other brackets are ordered separately, order by the above part numbers. Stainless steel mounting screw kit A set of stainless steel mounting screws (with set screws) described below is available and can be used as required by the operating environment.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

JXCx-OMT0005CN

=13880h 4Byte = 80h 5Byte = 38h 6Byte = 01h 7Byte = 00h 4 5 6 7 Byte8,9 Byte 1[mm/s] *5 300[mm/s]300d=012Ch 8Byte = 2Ch 9Byte = 01h 8 9 *5 21(P.85 35 - Byte10,11: Byte 10 1[%] *5 11 Byte12-15 Byte 12 0.01[mm] *5 800.00[mm]80d=13880h 12Byte = 80h 13Byte = 38h 14Byte = 01h 15Byte = 00h 13 14 15 Byte16-19 Byte 16 1 10 3 *5 1 1234 17 2 1 2 0 18 3 3 0 0 4 0 0 0 * 16.2.P.65

CL

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.

XLD NO SIZE RATING, VACUUM SERIES, XLD HIGH VACUUM VALVE, 2X, XLD NO SIZE RATING, 4.53515 lb

Part Number Description: VALVE SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, VALVE SEAL, VACUUM SERIES, XLD HIGH VACUUM VALVE, 21, XLD

XLD NO SIZE RATING, .00000 lb