Aluminum High Vacuum Angle Valve XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.
(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.
Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
(Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.
(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet. 34 Series SYJ5000 Flat Ribbon Cable Manifold Multiple valve wiring is simplified through the use of the flat cable connector.
(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
By combining the reference points of these two pieces of data, you will be able to see the CAD data of the SY5140-5LZ-02.
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage
Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard
control 0.05 to supply pressure Bracket Pressure gauge Silencer M5 to 2 1.15-1 E-P HYREG Series VY1 0.05 to 0.57 Pressure gauge 1.15-18 3/8 , 1/2 Cylinder acceleration/ deceleration control Applied pressure control 4 port E-P HYREG Series VY3 0.2 to 0.7 Auto balancing 1.15-29 1/4 Balance controller VY511, VYU5 1.5-2 Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g
Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g) Low cracking pressure 0.02MPa Standard model equipped with backflow function ARJ1020F Model M5 (Male thread) IN side Port size 6 4 OUT side (Applicable tube O.D.)
Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI PT M5X6MM TUBE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03847 lb
Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03584 lb
Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI PT M5X4MM TUBE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03481 lb
Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .04202 lb