Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: T (Terminal w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 3 (110 VAC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Table of Contents

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G Available only for white color body.

KJ

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G Available only for white color body.

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

SX

SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.) One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M SX5000 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Model: Size 2, Orifice Size: ø4.5, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: DIN Termianl w/Light, w/Surge Voltage Suppressor, Special Electrical Entry: None, Spacer: w/Spacer

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor), Special Electrical Entry: None, Spacer: A (w/Spacer)

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 M-5G2 Gasket material: Stainless steel 316, Special FKM X112 Applicable thread Gasket part no. M5 M-5G3 Suffix -X83 to the end of part number. Example) MS-5AU-4-X83 Spare Parts Description Part no.

V100

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VQ4000

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

Model: Size 2, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: Size 2, Orifice Size: ø4.5, Fitting Size: 1/4, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: Size 2, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Rc Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: Size 2, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -