Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 3 (110 VAC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 6 (12 VDC), Electrical Entry: TL (Terminal w/Light, w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 3 (110 VAC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 6 (12 VDC), Electrical Entry: G (Grommet)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 3 (110 VAC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 3/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical
Table of Contents + 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator
+ 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator
) 155 (3 position) 44 55 77.5 121 12 14 1 PB PA 5 3 R 21 39 54 65 4-Rc1/8 (pilot pressure exhaust port) P SMC R1 R2 17 17 6-Rc3/8 (ports P, R) 26.5 26.5 L: Dimensions n: Stations Formula 10 9 8 7 6 5 4 3 2 1 L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 8 Series VQ7-6 Optional Manifold Parts Blank plate assembly Blocking
Valve 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8, C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) A, B port C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Manifold base mass W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 Flat ribbon cable connector, Socket: 26
Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Faston Terminal, Special Electrical Entry: -, Spacer: -
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: F (Faston Terminal)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: F (Faston Terminal)
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical
manifold base to allow the external wiring to be piped all together with the 26 pin MIL connector. 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n
8)W = 43n + 77, 1.17579 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-20SX5 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 8C4 (One-touch fitting ?4)C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)W = 43n + 77
8)W = 43n + 77, 1.01409 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-20SX5 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 8C4 (One-touch fitting ?4)C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)W = 43n + 77
+ 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86)
A, B port location 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations SZ W = 19n + 45 W = 43n + 77 W = 51n + 81 Applicable flat ribbon