Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 3/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

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Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G Available only for white color body.

KJ

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G Available only for white color body.

SX

SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.) One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M SX5000 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: Size 3, Orifice Size: ø4.5, Fitting Size: 3/8, Fitting Type: Rc Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Rc Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 3 (3/8), Fitting Type: P (Rc Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: P (Rc Female Thread), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 3/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 M-5G2 Gasket material: Stainless steel 316, Special FKM X112 Applicable thread Gasket part no. M5 M-5G3 Suffix -X83 to the end of part number. Example) MS-5AU-4-X83 Spare Parts Description Part no.

V100

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.