Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.
Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !
Value is different from Kv and Cv factors for pneumatic purpose due to different test method. 3 3 Saturated steam flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) Water flow rate Q0 [L/min] (when Av = 1 x 106 [m2]) 2 Upstream pressure 2 P1 = 1 MPa P1 = 0.8 MPa 1 1 0.9 0.8 0.7 0.6 0.9 0.8 0.7 0.6 P1 = 0.6 MPa Example 2 P1 = 0.5 MPa P1 = 0.4 MPa 0.5 0.5 0.4 0.4 P1 = 0.3 MPa Example 1 0.3 0.3 P1
The minimum bending radius of the cable is 55 mm. 15 23 29 28 7 22 16 27 10 9 8 Sheath O.D. Approx. 8.8 Printed mark (Both sides) Lead wire color Lead wire no.
AL30 Rc 3/8 AL60 Rc 1 0.1 0.1 P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.08 0.08 P1 = 0.5 MPa Selection P1 = 0.3 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.1 MPa Warning 1. Do not introduce air from the outlet side as this can damage the damper. 0.06 0.06 P1 = 0.1 MPa 0.04 0.04 Caution 1.
SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2
Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397
Example: The figure below is based on the condition of set values as P1 = 40[kPa] and P2 = 20[kPa].
75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.
20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up
55 7 7 (The mounting side and the port position of CKQSF50 is .)
P-D()14.2 2. 14.1 3. 4.8.3 4. 4.10 4 4 4 (3) LECSC-AC100120V ON OFF RA MC MC SK NFB MC CNP1 L1 AC100120V CNP3 (5) U 2 U V 3 L2 V M W 4 N W 1 P1 (1) P2 PE CNP2 P (2) C D (3) CN2 L11 L21 CN6 CN6 DC24V DOCOM EMG (4) DOCOM DICOM (4) ALM RA 1. P1-P2() 2.
(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S
AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2
or less VFS5300 VFS5310 300 1.16 VFS Exhaust center VFS5400 VFS5410 55 or less 1.14 300 VS4 Pressure center VFS5500 55 or less VFS5510 1.14 VQ7 300 EVS Double check VFS5610 60 or less 1.99 180 VFN Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.
30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 5 4 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 Glossary of Terms 0.002 0.003 0.02 0.03 0.04 0.004 0.001 0.01 0.1 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when 15 [L/min] of water runs through a solenoid valve with a Kv = 1.5 [m3/h].
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
ZP3EU-F6-TAL16 [Weight: 249 g] M16 x 1.5 Width across flats 22 Width across flats 24 Width across flats 24 Width across flats 22 M16 x 1.5 Rc1/8 Rc1/8 6 6 19 25 55 6 6 19 30 25 55 32 32 30 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 78.6 93.8 Applicable pad part no.