Battery-less

JXCE1/91/P1/D1/L1/M1 Series LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 How to Order JXC 7 D T 1 Communication protocol E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link M CC-Link For single axis Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 177.)

Aluminum High Vacuum Angle Valve

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

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52 VQ4000 3/8 Exhaust center Metal seal VQ440 5 0 6.2 0.18 1.5 6.9 0.17 1.7 45 47 47 0.28 (0.34) Rubber seal VQ440 5 1 7.0 0.38 1.9 7.3 0.38 2.0 50 52 52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460

2/3 Port Valve

Ex2) 3 port valve: Switching nozzle VNH P1 P1 port (Pilot air SUP port) nozzle P1 port (Pilot air SUP port) 2(A) 1(P) Tank Coolant pump 3(B) Switching nozzles on supplying coolant liquid.

Table of Contents

ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)

Smooth Cylinder/Low Speed Cylinder

Installed state New Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) New New Existing foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 19 38 57 25 44 19 38 57 29 48 26 52 78 36 62 26 52 78 40 66 26 52 78 45 71 Existing model 26 52 78 52 78 31 62 93 64 95 36 72 108 77 113 42 84 126 98 140 45 90

Table of Contents

38 51.5 19 18.5 57.5 10 18.5 36 21 40 28.4 1 2 KQ2U10-U04 59 51 51 22 1 4 3 8 KQ2U12-U02 KQ2U12-U03 53 52 55 61 Connection thread 20.9 12 20.9 22 57.4 45.4 22 1 2 KQ2U12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Stability of suction position,

ZP3EU-F6-TB12 [Weight: 236 g] ZP2 ZP2V 26 18 26 18 ZP Width across flats 22 M12 x 1.75 M12 x 1.75 Width across flats 22 ZPT ZPR 6 27 19 52 6 27 19 52 11 11 XT661 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.

Modular F.R.L. Unit

P1 = 0.7MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.1MPa P1 = 0.5MPa 0.06 0.06 P1 = 0.1MPa P1 = 0.3MPa 0.04 0.04 Maintenance Warning 1.

Modular F.R.L. Unit

Specific Product Precautions P1 = 0.5MPa Pressure drop MPa 0.08 0.08 Pressure drop MPa P1 = 0.3MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.1MPa 0.06 0.06 Be sure to read before handling.

LEC-OM02704CN

P-D()14.2 2. 14.1 3. 4.8.3 4. 4.10 4 4 4 (3) LECSC-AC100120V ON OFF RA MC MC SK NFB MC CNP1 L1 AC100120V CNP3 (5) U 2 U V 3 L2 V M W 4 N W 1 P1 (1) P2 PE CNP2 P (2) C D (3) CN2 L11 L21 CN6 CN6 DC24V DOCOM EMG (4) DOCOM DICOM (4) ALM RA 1. P1-P2() 2.

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

ZP

Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

ZP

-10B: ZP3-13B: ZP3-16B: P.52 ZP3B-Y2BK6-B5 Mounting Adapter Part No.

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Port P2 Port P1 P2 P2 P1 P2 Port P1 Pressure is applied Operating direction P1 Pressure is applied Operating direction P2 Pressure is applied P2 Pressure is applied 1486 Magnetically Coupled Rodless Cylinder 3-Options available for stroke adjustment Bumper bolt (resin tipped) Bumper bolt (Same on the opposite side) Shock absorber + Adjustment bolt (metal ended) Adjustment bolt (Same on

Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

VFS

Refer to page 3-8-52 for details.

KJ

38 51.5 19 18.5 57.5 10 18.5 36 21 40 28.4 1 2 KQ2U10-U04 59 51 51 22 1 4 3 8 KQ2U12-U02 KQ2U12-U03 53 52 55 61 Connection thread 20.9 12 20.9 22 57.4 45.4 22 1 2 KQ2U12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

VM

(Copper-free) VH VHS IN P1 Flow Rate and Effective Area OUT IN P2 VR1211F Model Metric size 6 3.2 4 Applicable tubing O.D. If air is only supplied only to either P1 or P2 it, does not flow to the OUT side.

VM

(Copper-free) VH VHS IN P1 Flow Rate and Effective Area OUT IN P2 VR1211F Model Metric size 6 3.2 4 Applicable tubing O.D. If air is only supplied only to either P1 or P2 it, does not flow to the OUT side.