Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Table of Contents

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

AC

The required time to increase tank pressure from 0.8MPa to 1.0MPa at 0.5MPa supply pressure is calculated as follows 0.8 0.5 = = 1.6 P2 P1 P2 P1 1.0 0.5 = =2.0 1.0 0.5 = = 2.0 P2 P1 P2 P1 1.5 0.5 = = 3.0 0.8 0.5 = = 1.6 P2 P1 P2 P1 1.0 0.5 = = 2.0 With the pressure increase ratio from 1.6 to 2.0, the time of 6516=49 sec.(t) is given for 10l tank by the graph.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

1

32.5 44.5 6 CJ2 16 12.5 21 33 45 51 75 93 105 6.5 6 12 12 21 25 39 5.5 CM2 D-M9lV 10 13 13 20.5 32.5 44.5 6 16 12.5 12.5 21 33 45 51 75 93 105 6.5 CG1 6 8 17 21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 MB 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CA2 D-A9lV 10 9 9 16.5 28.5 40.5 2 CQ2 CQS 16 8.5 8.5 17 29 41 47 71 89 101 2.5 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW/

Title not found

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

Battery-less

to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20% 10 0 20 30 40 50 60 70 Max. 65% Model LEYG16M LmE

Modular Type Lubricators Series AL

AL30 Rc 3/8 AL60 Rc 1 0.1 0.1 P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.08 0.08 P1 = 0.5 MPa Selection P1 = 0.3 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.1 MPa Warning 1. Do not introduce air from the outlet side as this can damage the damper. 0.06 0.06 P1 = 0.1 MPa 0.04 0.04 Caution 1.

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

High Vacuum Angle Valve

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

LEC-OM02704CN

RWwn+6 RYn+20 RYn+21 No. RXn+20 RXn+21 RWn+2 RYn1RYn2 16bit(RWwn4) 16bit(RWwn5) (RWwn6) ON (RY(n2)0) OFF ON (RY(n2)1) OFF () ON (RX(n2)0) OFF ON (RX(n2)1) OFF (RWrn2) 6ms ON (RYn1RYn2) OFF .

Booster Regulator/Air Tank

Flow Rate Characteristics Flow Rate Characteristics VBAT05A 2 1.6 0.1 ARJ 1.4 Outlet pressure (MPa) Outlet pressure (MPa) P1 = 1.0 MPa 1.2 P1 = 0.8 MPa Max. pulsation range (MPa) AR425 to 935 0.08 P1 = 0.75 MPa P1 = 0.7 MPa 1 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.5 MPa 1 0.8 P1 = 0.4 MPa 0.06 ARX P1 = 0.3 MPa P1 = P2 0.6 P1 = P2 AMR 0.04 0.4 0.2 ARM 0.02 VBAT05A 0 500 1000 1500 2000 2500 3000

New

Value is different from Kv and Cv factors for pneumatic purpose due to different test method. 3 3 Saturated steam flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) Water flow rate Q0 [L/min] (when Av = 1 x 106 [m2]) 2 Upstream pressure 2 P1 = 1 MPa P1 = 0.8 MPa 1 1 0.9 0.8 0.7 0.6 0.9 0.8 0.7 0.6 P1 = 0.6 MPa Example 2 P1 = 0.5 MPa P1 = 0.4 MPa 0.5 0.5 0.4 0.4 P1 = 0.3 MPa Example 1 0.3 0.3 P1

Table of Contents

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

Booster Regulator Series VBA1110 to 4200 1

P1=0.5MPa =0.5MPa P1=0.5MPa =0.5MPa P1=0.4MPa P1=0.5MPa P1=0.5MPa 0.4 P1=0.4MPa =0.4MPa VBA2 VBA2 VBA4 VBA4 VBA2 VBA4 AV 0.3 P1=0.3MPa =0.3MPa P1=0.4MPa =0.4MPa P1=0.3MPa =0.3MPa P1=0.3MPa P1=0.4MPa P1=0.3MPa 0.2 AU 0.1 AF 0 200 400 600 800 1000 1200 1400 1600 1800 2000 Outlet air flow (l/min (AMR)) Outlet air flow (l/min (AMR)) Outlet air flow (l/min (ANR)) Pressure Characteristics Inlet

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6