Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: DC Low Wattage Type (0.5W, Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: Suction Filter, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: ø4, Elbow, Vacuum, V

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: Supply: Latching Negative Common, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: Suction Filter, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: ø4,

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P3A (Pressure Sensor, -100 to 100kPa, Accuracy ±1%

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Nozzle Nominal Size: ø0.7, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

1

The minimum bending radius of the cable is 55 mm. 15 23 29 28 7 22 16 27 10 9 8 Sheath O.D. Approx. 8.8 Printed mark (Both sides) Lead wire color Lead wire no.

Made to Order

65 50 55 65 55 65 80 55 65 80 16 8 9 39 49 44 49 59 54 59 69 59 69 84 69 79 94 20 8 9 45 55 50 55 65 60 65 75 55 65 80 65 75 90 25 10 11 51 61 56 61 71 66 71 81 61 71 86 71 81 96 32 12 13 55 65 60 65 75 70 75 85 65 75 90 75 85 100 Dimensions except mentioned above are the same as standard type. 1822 Made to Order Common Specifications: -XC35: With Coil Scraper Symbol With Coil Scraper 39

Table of Contents

st to 100 st 68 78 93 98.5 Bore size (mm) FB B Over 100 st 117 117.5 30 st or less 56 62 76 82.5 18 18 19 19 55 59 66 66.5 12 16 20 25 2.

Table of Contents

20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up

CATALOG

63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

A

63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

Table of Contents

Refer to page 8-30-55 for the details.

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 Size Motor type FA FB FC FD FE FF FG FH FK NZ, NW, NU, NT M5 x 0.8 10 70 50 3.5 67.7 78 22.5 50 63 NY M4 x 0.7 8 70 50 3.5 67.7 78 22.5 50 NX M5 x 0.8 10 63 40 3.5 72.7 78 27.5 55 NV M4 x 0.7 10 63 40 3.5 72.7 78 27.5 55

5

(n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 60 70 85 110 115 120 n (Same surface) 60 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 70 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 55 (n