Table of Contents

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

V100

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

Made to Order

MH + Stroke Y + Stroke ZZ + 2 strokes MGC Series (mm) MT Bore size (mm) R Y MA MB MC MD MI MK MM MGC series 20 to 50 20 25 32 40 50 12 77 12 10 3.6 8 14 7 M6 x 1 9 12 77 17 13 5 10 20 9 M8 x 1.25 11 12 79 17 13 5 12 20 9 M8 x 1.25 11 Front mounting flange Width across flats MB Width across flats MA M10 x 1.25 13 87 19 17 6 16 25 10 11 M14 x 1.5 14 102 24 19 8 20 32 13 11 MD MI MM Adjustment

Air Cylinder

26 8 20 0 0.033 13 10.5 8 41 5 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 8 10 32 32 52 36 25 22 19.5 17 32 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 9 10 40 40 60 40 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 9 10 40 40 60 40 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 10 11 53 53 77 44.5

Air Cylinder

(18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size NA S TA TB ZZ Bore size TC TD TE TF TG 20 24 69 (77) 11 11 106 (114) 25 29 69 (77) 11 11 111 (119) 32 35.5 71 (79) 11 10 (11) 113 (121) 40 44 78 (87) 12 10 (12) 130 (139) 50 55 90 (102) 13 12 (13) 150 (162) 63 69 90 (102) 13 12 (13) 150 (162) 80 86 108 (122) 182 (196

NCA1

3 1/2 4.25 1/2 1 1/2 3 13/16 R ADD STROKE ET F G J K BORE E EB EE(NPT) EL EO ES LB P SE 6.44 5 7/8 3 1/4 7 3/8 2 1/32 3/4 2 1 1/2 9/16 8 8 1/2 11/16 3/4 1 1/8 5/8 2 1/4 7.92 7 1/8 4 1/8 9 2 11/16 3/4 2 1/4 2 11/16 10 10 5/8 13/16 1 1 5/16 5/8 2 3/4 9.40 7 5/8 4 5/8 9 1/2 10.90 8 7/8 5 1/2 11 1/8 3 5/16 3/4 2 1/4 2 11/16 3 13/16 3/4 2 3/4 2 1/4 3/4 12 12 3/4 13/16 1 1 5/16 5/8 3 1/2 14 14

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Air Cylinder NCA1 Series

3 1/2 4.25 1/2 1 1/2 3 13/16 R ADD STROKE ET F G J K BORE E EB EE(NPT) EL EO ES LB P SE 6.44 5 7/8 3 1/4 7 3/8 2 1/32 3/4 2 1 1/2 9/16 8 8 1/2 11/16 3/4 1 1/8 5/8 2 1/4 7.92 7 1/8 4 1/8 9 2 11/16 3/4 2 1/4 2 11/16 10 10 5/8 13/16 1 1 5/16 5/8 2 3/4 9.40 7 5/8 4 5/8 9 1/2 10.90 8 7/8 5 1/2 11 1/8 3 5/16 3/4 2 1/4 2 11/16 3 13/16 3/4 2 3/4 2 1/4 3/4 12 12 3/4 13/16 1 1 5/16 5/8 3 1/2 14 14

LEC-OM02704CN

LEC-MR-J3BAT 19X(10)Y(11)Z(12) 200410SERIAL 4X 13 13 13 13.4 UVW 600VEP(2PNCT) 8 UL/C-UL(CSA)UL60 30m (1) U L 1 U L 2 V V L 3 ( ) W W L 11 L 1 2 B1 B 2 N C C P (2) CN1 CC-Link ((3)) BU BV BW OHS1 OHS 2 .

CQ2

11 13.5 17.5 21.0 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5

CL

#2 (#2+#11) , #3 (#1+#3+#11) , #4 (#1+#4+#11) , #5 (#1+#5+#11) , #6 (#6+#11+#13) , #7 (#7+#11+#13) , #8 (#1+#8+#11) , #9 , #10 Rubber bumper basic style Air cushion basic style Axial direction foot style Front flange style Rear flange stye Front trunnion style Rear trunnion style Clevis style Accessory Rod boot Bore size Bore size Bore size Bore size Bore size Bore size Bore size Bore size

Compact 5-Port Solenoid Valve

COM. 13 14 13 14 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 1 2 1 2 1 2 (P, PC: 26 pins) (PG, PGC: 20 pins) (PH, PHC: 10 pins) A mixture of single and double wiring can be specified on the manifold specification sheet. The maximum number of stations is determined according to the number of solenoids.

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

CM2

SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A, #11 SCM240A, #11, #5 SCM240A, #11, #5, #19 1.4-42 Series CM2 Single Clevis (C) CM2C Bore size Stroke S T (mm) N P Bore U E CD I RR A NA CI K AL NN CX L B1 D MM F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13

Vacuum Pad

16 20 32.5 39 49 11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

11 13.5 A 21 16 14 16.5 A 9 7 9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W

CM2

TT TD Q P WB N1 G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard Type