Table of Contents

K Y A J K B Y C D Misc.

F

-6 19.5 5/16 10 86 10 18 29.5 27 10.6 61.5 12 16 18.5 5/32 6 30 KM11-03-09-10 21.5 3/8 6 77.8 10 19.5 31.5 30.5 13.3 48 13 17 21 1/4 7 32 KM11-07-11-6 21.5 10 13.3 3/8 104 10 19.5 31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2 83 15 18.5 22 5/16 9.5 62 KM11-09-13-10 MORE DIMENSIONS

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

SZ3000

D Side U Side C Switch specifications w How to Order Valves Nil J Without switch With switch Enter the symbols for the required specifications in the blanks below.

•

ASP with PHot Check Valve enes How to Order ASP S;:30F 0,1 ,0615 t .. , I .""~" Pilot ch".J Body size e diameter size '3: 1/8 standard Applicable tube outsid Millimeter size Inch 06 07 01/4" I 06 '~ 1/4 standard 5 3/8 standard 6 1/2 standard 08 08 05/16" .09 I 10 010 ~1 1 * 03/8' L12 " 012 1211/2" ;~ Type I 3 I Untversal Port size . +' ) PH otport 4' ; ~Y!l1bOl Cylir!

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

24 35 67 15.5 17.5 ZFC201-07 1/4" ZFC201-09 5/16" 1113 Series ZFC Element Replacement Element replacement procedure 4.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

/N.O. 1 2 3 4 5 A B C Switch Made to Order Nil J Without switch With switch Main valve fluororubber (Refer to page 411.)

0.4

VVQ1000-J-1-A VVQ1000-J-1-B Ejector valve model Nozzle diameter (mm) 0.7 1.0 Max. suction flow rate N (NL/min) 11 20 Note 1) SUP and EXH ports on the ejector unit manifold base are arranged on D-side alone. The end plate on the U-side is the same as that used in the L kit. Note 2) Individual piping is provided for the supply and exhaust ports of the ejector unit.

C95Series

. __ I -='.1' .J.. ~ ~ _.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

SX

Internal Wiring of Manifold 09 9 stations Serial type 45S3 16 16 stations This also includes the number of blanking plate assemblies. When special wiring is required on manifold with 2 to 8 stations, please use the manifold specification sheet. G71-OD16 output no.