High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

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L Speed: V [mm/s] Calculation example) T1 to T4 can be calculated as follows. a1 a2 Time [s] T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] T1 T2 T3 T4 L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration T2 = L : Stroke [mm] time can be obtained by the following equation. 200 0.5 300 (0.1 + 0.1) 300 (Operating condition) V : Speed

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Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 01: R 1/8 T1: NPTF 1/8 IF 2-3.5 Mounting hole 13 Data M5 x 0.8 Connector type 30 SE3C I Z 01 T1 20.5 RESET button DOWN button SET button UP button Lead wire length 600 39 8.5 3.5 (3000) 10 01: R 1/8 T1: NPTF 1/8 2-3.5 Mounting hole 13 M5 x 0.8 16-4-7 8 Series ZSE3/ISE3 Dimensions/Switch Only Grommet type ZSE3

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Thermo-chiller/Rack Mount Type

fluid (volume) flow rate qv Circulating fluid specific heat C Circulating fluid outlet temperature T1 Circulating fluid return temperature T2 Circulating fluid temperature difference iT Conversion factor: hours to minutes Conversion factor: kcal/h to kW : (= r x qv x 60) [kgf/h] : 1 [kgf/L] : 10 [L/min] : 1.0 x 103 [cal/(kgfC)] : 20 [C] : 22 [C] : 2.0 [C] (= T2 T1) : 60 [min/h] : 860 [(

HRX-OM-W002

If Option T is selected, Option T1 cannot be selected.

VQ5000

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

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/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

CATALOG

Proof 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output P I P I N G S P E C I F I C AT I O N S 01 Direct Piping 1/8 PT T1 NPTF 1/8 H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 ISE4 B D W I R I N G S P E C I F I C AT I O N S O P E R AT I N G P R E S S U R E L Grommet Entry 3m Lead 0.6m -0.1 ~ 1MPa L -10 ~ 100KPa DIN R A I L M O U N T I N

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Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

SMC Electronic Switch Series Variations

01 T1 01 T1 Grommet style/ZSE2-15 Connector style/ZSE2-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 Lead wire length 600 15 (3000) H H L L 20 20 Lead wire length 600 Lead wire length 600 Lead wire length 600 (3000) 9.5 39 8.5 39 8.5 3.5 3.5 3.5 Mounting hole 3.5 Mounting hole 2201: R(PT) 1/8 T1: NPTF1/8 01: R(PT) 1/8 T1: NPTF1/8 M5 X 0.8 Depth

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

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6N q w e r t y u i o !

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

HRX-OM-X084

Change circulating fluid setting temperature.Set the pump output (option T1 only).

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.