ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

2

e !

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

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L Speed: V [mm/s] Calculation example) T1 to T4 can be calculated as follows. a1 a2 Time [s] T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] T1 T2 T3 T4 L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration T2 = L : Stroke [mm] time can be obtained by the following equation. 200 0.5 300 (0.1 + 0.1) 300 (Operating condition) V : Speed

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Table of Contents

C D E F Dimensions Part no.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

ZP

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Environment

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Table of Contents

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Thermo-chiller/Rack Mount Type

Circulating fluid at the rated flow, r Circulating fluid: Tap water, t Power supply: 200 VAC, y Piping length: Shortest For models with an inverter pump mounted (Option T1), the cooling capacity will decrease by 300 W. 4 q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Circulating fluid at the rated flow, r Circulating fluid: Tap water, t Power supply: 200 VAC, y Piping

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: Double, 3-position/With light (For B side) E: Single, Double, 3-position/ Without light (A/B side common) V118-A B E V118-A B E 4 Pilot valve assembly 4 Pilot valve assembly Coil type Coil type Nil Standard (0.95 W) Y Low wattage type (0.4 W) Nil Standard (0.95 W) Y Low wattage type (0.4 W) 528 Construction VQ5000 Series Plug Lead Unit Metal seal type Rubber seal type e q w q w e SV SYJ

CATALOG

www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

Slider Type Ball Screw Drive/11-LEFS Series

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

240

3 e u !

HRX-OM-W002

If Option T is selected, Option T1 cannot be selected.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.