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M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG) M11(BWNG) M12(MEND) M13 (DB) M14(POT) M15 M16 M17 M18 M19 M20 M21 M22 M23 M24 M25 M26(ALM) M27Ready(CRD) M28 M29 M30 M31 10 7.1.3 RY(160H1DFH)1 2 X20ON ON (RY00) 2 (RY0B) /(RY06) 10ms *1 (RY01) 10ms *1 M100M131

https://smccatalog.partbuilder.smcpneumatics.com/dl_catalogs/assets/manual/zh-cn/files/LEC-OM02704CN.pdf

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

https://www.smcpneumatics.com/pdfs/smc/70vsysperi.pdf

ZM132HF-M21L

Style: 2 (Single Unit w/Standard Silencer, w/o Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: Without Valve, Solenoid Valve Rated Voltage: W/out Valve/Air Operated, Electrical Entry: W/out Valve/Air Operated, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM132HF-M21L

ZM051HT-K5LZ-M21L

), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM051HT-K5LZ-M21L

ZM071M-K1LB-M21

/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: M (0.35 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 1 (100VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: B (Locking Slotted Type), Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM071M-K1LB-M21

ZM103HT-K5LZB-M21L

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: B (Locking Slotted Type), Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM103HT-K5LZB-M21L

ZM131HF-B5LZ-M21L-Q

Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: B (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131HF-B5LZ-M21L-Q

ZM131H-K5LZ-M21L-Q

Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131H-K5LZ-M21L-Q

ZM132HF-M21L-Q

Style: 2 (Single Unit w/Standard Silencer, w/o Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: Without Valve, Solenoid Valve Rated Voltage: W/out Valve/Air Operated, Electrical Entry: W/out Valve/Air Operated, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM132HF-M21L-Q

ZM101H-K5LOZ-M21L

Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM101H-K5LOZ-M21L

ZM103H-J5LOZ-M21L

: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: J (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM103H-J5LOZ-M21L

ZM131HF-A5LZ-M21L-Q

Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: A (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131HF-A5LZ-M21L-Q

ZM131HF-K5LZ-M21

Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131HF-K5LZ-M21

ZM131HF-K5LZ-M21L

Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131HF-K5LZ-M21L

ZM103H-K3LZ-M21

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM103H-K3LZ-M21

ZM103HT-K3LZ-M21

Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM103HT-K3LZ-M21

ZM131HF-J5LZ-M21L-Q

Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: J (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131HF-J5LZ-M21L-Q

ZM131HF-K5LZ-M21L-Q

Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: F (G), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131HF-K5LZ-M21L-Q

ZM131H-A5LZ-M21L

+ Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: A (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM131H-A5LZ-M21L

ZM101H-K3LZ-M21

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/ZM101H-K3LZ-M21