Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: G1/4, Direct Mounting, Female Thread, Vacuum Inlet: -
Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: G1/8, Direct Mounting, Male Thread, Vacuum Inlet: -
Vacuum Pad ZP3P-20PTSF ZP3P-25PTSF Applicable pad part no. ZP3P-35PTSF ZP3P-50PTSF 11 ZP3P Series Buffer Assembly Part Nos.
20 JT2 SF ZP3PG20JT2SF-7A-X2 21 ZP3P-20JT2SF-W ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3PA-T2JT-7A-X2 ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM ZP3P 20 JT5 SF ZP3PG20JT5SF-7A-X2 23 ZP3P-20JT5SF-WG ZP3PA-T1JT-7A-X2 ZP3P 25 JT5 SF ZP3PG25JT5SF-7A-X2 25 ZP3P-25JT5SF-WG ZP3P 32 JT5 SF ZP3PG32JT5SF
Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)
Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)
Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: 10 (ø10, One-touch Fitting)
Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø40, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread
Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread
Adapter Material: Aluminum, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: ø10, One-touch Fitting
() 4. (2 PC224 4) A17 CPU A19 3 (Flash-ROM) ROM A17 A19 A1A A20 2 1. (CN2) 2. 3. () A24 (U VW) 1. 2. 3. UVW A24 15 103 15 A25 1. () 23 2. 3. 4. 23 15 104 15 A30 1. PA02 2. 3. 1. 2. 3. 4. LECSC2AC260V LECSC1AC135V 5. 6. 1. 2. A31 1. 2. 3. 1. 2. 4. (PA06PA07) 5. A32 ((A32) OFF/ON 1. (UVW) 2. (IPMIGBT) ON UVW A32 (IPMIGBT) 2. 3.
A32 A33 A34 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A2, A18, A20, A22, A31, A32, A33, and A34 are provided in the table below.
Refer to page 69 for adapter applicable to the ZP2 series. 15.6 10.6 2 Series ZP2 How to Order N With adapter ZP2 T B02 MU A3 Vacuum inlet direction Mounting Direction Vertical Symbol Pad diameter (Symbol) Thread size B035 B02 B04 B05 B06 B08 B10 B15 T A3 (M3 x 0.5 Male thread) H5 (M5 x 0.8 Male thread) B5 (M5 x 0.8 Female thread) Pad diameter Symbol Pad diameter Blast type B02 B035 B04 B05
Refer to page 69 for adapter applicable to the ZP2 series. 15.6 10.6 2 Series ZP2 How to Order N With adapter ZP2 T B02 MU A3 Vacuum inlet direction Mounting Direction Vertical Symbol Pad diameter (Symbol) Thread size B035 B02 B04 B05 B06 B08 B10 B15 T A3 (M3 x 0.5 Male thread) H5 (M5 x 0.8 Male thread) B5 (M5 x 0.8 Female thread) Pad diameter Symbol Pad diameter Blast type B02 B035 B04 B05
Refer to page 69 for adapter applicable to the ZP2 series. 15.6 10.6 2 Series ZP2 How to Order N With adapter ZP2 T B02 MU A3 Vacuum inlet direction Mounting Direction Vertical Symbol Pad diameter (Symbol) Thread size B035 B02 B04 B05 B06 B08 B10 B15 T A3 (M3 x 0.5 Male thread) H5 (M5 x 0.8 Male thread) B5 (M5 x 0.8 Female thread) Pad diameter Symbol Pad diameter Blast type B02 B035 B04 B05
. : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x 0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..
. : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x 0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..
Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: W (w/Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: 10 (ø10, One-touch Fitting)
Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: W (w/Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)
Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT2SF (2.5 Stage), Guide Attachment: W (w/Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)