Battery-less

Insulation color Dot mark Dot color B1 Yellow Red B2 Light green Black B3 Light green Red B4 Gray Black B5 Gray Red B6 White Black B7 White Red B8 Light brown Black B9 Light brown Red B10 Yellow Black B11 Yellow Red B12 Light green Black B13 Light green Red Shield Conductor size: AWG28 Weight Product no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Insulation color Dot mark Dot color B1 Yellow Red B2 Light green Black B3 Light green Red B4 Gray Black B5 Gray Red B6 White Black B7 White Red B8 Light brown Black B9 Light brown Red B10 Yellow Black B11 Yellow Red B12 Light green Black B13 Light green Red Shield Conductor size: AWG28 Weight Product no.

Fieldbus System

CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9 BN3 BN7 BN9 Straight port, mixed sizes 5/32" One-touch fitting Upward Downward L4 L6 L8 B4

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

SZ3000

Elbow fitting assembly (Downward) B4: 4 elbow fitting assembly B6: 6 elbow fitting assembly 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve: N.C./N.C. A 4 Back pressure check valve (A) 4 (B) 2 Nil K None A 2 B SOL.b SOL.a 3 (R) 5 (R) Built-in The built-in back pressure check valve type has an effective area approximately 20% smaller.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

External pilot Nil R Internal pilot Elbow fitting assembly (downward) B4: 4 elbow fitting assembly B6: 6 elbow fitting assembly 5 (EA) 1 (P) 3 (EB) The 4 position dual 3 port valve is not available with external pilot specifications. 4 position dual 3 port valve: N.C./N.C.

LA-OMT0056

A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input

Vacuum

(mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Table of Contents

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

ZCUK

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

Vacuum

(mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

VQC

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow Wtih 3.2 One-touch fitting Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting M5 thread Bottom ported elbow With 3.2 One-touch fitting Bottom ported elbow With 4

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) L5 B3 Nil PNP (+) or without SI unit/input block (SD0) NPN () N B4 Input block type (Fill out for I/O unit only) B6 B5 LM Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) 1 2 3 Ports 2, 4 size (inch) Ports 2, 4 Symbol N1 N3 N7 NM Ports 1, 3, 5 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting Mixed Top ported elbow 1

5 Port Solenoid Valve, Series VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil Without SI unit/input block (SD0) Without input block With 1 input block Nil DeviceNet PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

Series VQ Base Mounted Metal Seal/Rubber Seal

2 sets of regulator unit 3 sets of regulator unit With vacuum ejector unit B D G1 G2 G3 J K N R S (2) Series VQ1000 1 (3) Kit Manifold (3) (3) Plug-in unit 1 (4) Stations (5) Special wiring specification (Not double wiring) With name plate External pilot Built-in silencer (Direct exhaust) Cylinder ports 01 1 station Symbol Port size Symbol Port size C3 C4 C6 M5 CM L3 L4 (6) L6 L5 B3 B4

VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil DeviceNet Nil Without SI unit/input block (SD0) Without input block With 1 input block PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate