1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

2

-A C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A Note) Bowl seal is included for the AL20-A to AL60-A.

CATALOG

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

Table of Contents

A F u Pilot solenoid valve SF4--23 (Refer to the table below.)

Table of Contents

17.5 15 17.5 22 23 23 24 22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.

Table of Contents

Y ZPT02U ZPT04U ZPT06U ZPT08U 10 11 ZPT10UT 13 14 1.5 ZPT13UT 16 17 ZPT16UT 10 11 0.8 ZPT10CT 13 14 ZPT13CT 16 17 1 ZPT16CT B C D E G D E G D E G D E G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep

A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Air Slide Table

Pilot port 2 x M5 x 0.8 J I 5.5 +0.025 0 3H9 ( ) depth 1.5 23 4.1 (Maximum screw-in depth) 3.5 19.7 2.1 (Minimum screw-in depth) B 16 38 3 21 32 19 B N x M3 x 0.512 F +0.025 0 3H9 ( ) depth 1.5 N 2 1 x F 15 2 x M3 x 0.5 thread depth 5 Cross-sectional view B-B 12 10 23 27 M 0.5 J Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) I 5.5 Z Bottom view of MXQ8A-30Z ZZ +0.025 0 3H9 ( ) depth

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Table of Contents

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

Table of Contents

Gripping point L (mm) MRHQ F F Misc.

ZP

Y ZPT02U ZPT04U ZPT06U ZPT08U 10 11 ZPT10UT 13 14 1.5 ZPT13UT 16 17 ZPT16UT 10 11 0.8 ZPT10CT 13 14 ZPT13CT 16 17 1 ZPT16CT B C D E G D E G D E G D E G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 1.7 20 23 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 1.8 25 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 2.3 35 32 Deep

ZP

Y ZPT02U ZPT04U ZPT06U ZPT08U 10 11 ZPT10UT 13 14 1.5 ZPT13UT 16 17 ZPT16UT 10 11 0.8 ZPT10CT 13 14 ZPT13CT 16 17 1 ZPT16CT B C D E G D E G D E G D E G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep

Made to Order

1000 M12 x 1.75 depth 23 M12 x 1.75 depth 23 138 160 214 76 115 Rc 3/8 119.5 20.5 90 75 35 224 128 23 8.5 104 69 201 358 350 to 1000 M14 x 2 depth 28 153 190 245 80 125 Rc 3/8 150 23 102 95 40 262 143 33 10.5 128 87 249 431 350 to 1000 M14 x 2 depth 30 153 190 245 80 125 Rc 1/2 170 23 116 114 40 262 143 37.5 10.5 128 87 269 431 350 to 1000 1852 Made to Order Common Specifications: Built-in

Hydraulic

1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 123 Hydraulic Cylinders: Technical Data 2 Series CHA Stroke range limit charts: Bore sizes 40, 50, 63, 80 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F F F Bore size 40 Bore size 50 3000 2 4 8 9 3 7 2 4 3 7 5 2000 8 9 1 5 1 6

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY5120-01(-F ) G H 1 2 VQ5 32.3 VQC (A, B port) 1/8 0.8 1.6 16.2 VQZ (20) 15 EA P EB 28.1 [35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7

TABLE OF CONTENTS

Ethylene-Propylene Rubber Elastomer Oil Resistance Excellent Excellent Good up to Fails up to 225 F. up to 400 F. 225 F. Water Resistance Excellent Good up to Good up to Excellent up to 150 F. 180 F. 150 F. 210 F. Air Resistance Excellent Excellent Excellent Good (no oi) up to 180 F. up to 350 F. up to 180 F. up to 180 F.