ZX

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

ZR

PE port Pilot valve exhaust port M5 PD port M5 PE port Pilot valve exhaust port M5 PD port Non-locking push type Manual override Non-locking push type Manual override Vacuum release pressure port Vacuum release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV

Table of Contents

) (Hexagon socket head plug) MY1BG MY1BG VV VV 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

Electric Actuators

to Cross section C-C.

LEC-OM02704CN

AC200230V AC100120V 40 6 AC100120V AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log

MY1

) (Hexagon socket head plug) MY1BG MY1BG VV VV 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV

Compact 5-Port Solenoid Valve

D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)

Table of Contents

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

MY1

20 25 30.5 NE 27.8 34 40.5 50 63 NG 13.5 17.5 28 33 42.5 NH 27 33.5 39 49 61.5 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 PB 20 25 30 35 40 PC 40 50 55 70 85 PD 4.5 5 6 10 12.0 Q 153 191 206 264 322 QW 30 36 42 51 59 Z 160 200 220 280 340 NW 37 45 53 64 75 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1

48

x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23

Compact Guide Cylinder

x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23

MY2

line U Long hole depth Y B Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW C LW NV LD T-slot for body mounting NC MY2H40G LE H7 depth R GB Cushion needle 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

158 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 G 8.5 10.7 15.5 LW 120 176 229 M 9 12 16 N 20 25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 PA 44 63 113 PB 80 110 132 PE 1 3.4 0.5 R 5 8

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

ZSE10(F) meets UL/CSA, CE and RoHS standards, and has an IP40 enclosure rating.

ZSE10(F) meets UL/CSA, CE and RoHS standards, and has an IP40 enclosure rating.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MY3A40 MY3A63 A B C E G H HG JJ KK L LD LL LW M N 55 06.0 18 2 09.5 27 05.0 M4 x 0.7 05.0 065 03.5 22.5 041 06 13.5 M5 x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model