Made to Order

A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

1

(Standard body dimensions) DE E -X -XA17 -XA21 20DA Data MM MM 30 (Standard body dimensions) 30 (Standard body dimensions) T A A E E 6-17-13 12 Simple Specials: -XC14: Change of Trunnion Bracket Mounting Position These changes are dealt with Simple Specials System.

Combination Cylinder

With rod boot Bore (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 12 14 18 25 85 95 95 103 10 10 10 10 19 20 21 23 18 22 22 30 14 16.5 20 26 to 200 to 300 to 300 to 300 15.5 19.5 19.5 27 13 17 17 19 38 45 45 52 91 101 102 111 57.5 69 69 76 54 62 62 67 3.5 4 4 4 5.5 9 9 11 4 7 7 8 4 7 7 8 26 31 38 47 M4 depth 7 M5 depth 5 M5 depth 8 M6 depth 12

CL

With Air Cushion/Basic: CLG1BA Bore (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 to 200 to 300 to 300 to 300 15.5 19.5 19.5 27 18 22 22 30 13 17 17 19 57.5 69 69 76 8 10 12 16 M4 X 0.7 depth 7 M5 X 0.8 depth 5 M5 X 0.8 depth 8 M6 X 1 depth 12 5 5.5 5.5 6 10 14 24 29 35.5 44 12 14 18 25 14 16.5 20 26 38 45 45 52 M8 X 1.25 M10 X 1.25 M10 X 1.25

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

CATALOG

N S I O N S S E E N E X T P A G E Port Position Body Side or Axial Direction Body Side or Axial Direction Body Side or Axial Direction Body Side or Axial Direction M5 x 0.8 Body Size Port Size M5 x 0.8 M5 x 0.8 M3 x 0.5 Axial Direction M3 x 0.5 H O W T O O R D E R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Air Cylinder Series CM2

x 0.8, 1/8 Note 1) M5 x 0.8, 1/8 Note 1) 1/4 1/4 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note 1) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1162 Series 10-, 11-CM2X Microspeed Cylinder for

A

N S I O N S S E E N E X T P A G E Port Position Body Side or Axial Direction Body Side or Axial Direction Body Side or Axial Direction Body Side or Axial Direction M5 x 0.8 Body Size Port Size M5 x 0.8 M5 x 0.8 M3 x 0.5 Axial Direction M3 x 0.5 H O W T O O R D E R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

ZB-OM00301

M5 Q1 +COM N.C.

Compact Vacuum Unit Ejector/ Vacuum Pump System

M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

Clean Gas Filter

Construction q t e r w IN Description No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

Short Stroke Electric Actuator Series LX

G GD GB GDB GU GUB N.O.

Guide Cylinder/Compact Type Series MGC

Note 2) Bore sizes 20 and 25: M5 x 0.8 only.

Table of Contents

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket