Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Pressure Switch For General Fluids Dimensions ZSE/ISE802L N02L C01L A2L B2L 2 41 25.2 30 20 20 10 30 60.5 (N02L: 61.5) 2 x M3 x 0.5 thread depth 4 ZSE ISE Piping port 02L: R1/4 N02L: NPT1/4 3.5 ZSP PS 8.8 Atmospheric vent port 2.6 ISA PSE IS 10.3 29.5 ISG ZSM Width across flats 17 M5 x 0.8 thread depth 5 41 2 25.2 49.5 58.8 64.8 Piping port Rc1/8 Piping port URJ1/4 Piping port TSJ1/4 -A2L

Table of Contents

VVFS3000-5-1A VVFS3000-5-2 VVFS3000-7-1 VVFS3000-8 19.8 x 16.6 x 1.6 (End plate) 20 x 16 x 2 (Manifold block) 6.2 x 3 x 1.6 VVFS3000-6A VVFS3000-4AAZ738-22AAXT336-9 No. q w e r t y u i Material Steel plate Steel plate NBR NBR NBR NBR NBR For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly !0.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ7-6/7-8

/4, 3/8 X(PE) port 3-10-9 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7

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ITVH With digital pressure switch: IR12l0-01lEl-A ITVX 42 PVQ M10 x 1 25 31 7.5 VY1 Mounting hole M28 x 1.5 1.6 VBA VBAT 4.5 2 x 1/8 Port size 90.5 AP100 53.5 45.9 37.6 9.8 OUT IN 30 EXH 57 EXH 2 x 1/8 Pressure gauge port 35 783 IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR22l0-02l-A 12.5 48 2 Bracket 30 Mounting hole for hexagon panel nut 48 Bracket (Option) 30 Max. 4 Pressure

90

ITVH With digital pressure switch: IR10l0-01lEl-A ITVX 42 PVQ M10 x 1 25 31 7.5 VY1 Mounting hole M28 x 1.5 1.6 VBA VBAT 4.5 2 x 1/8 Port size BLEED 90.5 AP100 53.5 45.9 37.6 9.8 OUT IN 30 EXH 57 EXH 2 x 1/8 Pressure gauge port 35 801 IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR20l0-02l-A 12.5 48 2 Bracket 30 Mounting hole for hexagon panel nut 48 Bracket (Option) 30 Max

VS7-6

Unit/Specifications Air filter (w/auto-drain, w/manual drain) 5m Filtration Regulator 0.05 to 0.85MPa Set press.

This is a legacy product, and replaced byISE20C-Y-02L-W, SWITCH ASSEMBLY, INSTRUMENTATION, ISE40/50/60 PRESSURE SWITCH, DA, ISE40/50/60 1/4 PT VERSION, .22639 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureWetted parts materialApplicable fluidPort sizePower supply voltageCurrent consumption--Switch outputRepeatabilityHysteresisAnalog outputAuto-shift inputDisplayDisplay

This is a legacy product, and replaced byISE20C-Y-M-02L-W, SWITCH ASSEMBLY, INSTRUMENTATION, ISE40/50/60 PRESSURE SWITCH, DA, ISE40/50/60 1/4 PT VERSION, .50472 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureWetted parts materialApplicable fluidPort sizePower supply voltageCurrent consumption--Switch outputRepeatabilityHysteresisAnalog outputAuto-shift inputDisplayDisplay

Digital Pressure Switch

Units selection function W Wetted part (or part exposed to fluid) The part of the Pressure switch which is in contact with the detected fluid, such as a pressure sensor, seal, or fitting. Window comparator mode An output type which holds the output when the pressure is within a certain range. (Refer to "List of output modes" on page 26).

PSxx-OMM0002CN

x n +4 x (n -1) -57No.PS-OMM0002CN-F A B C D E 4 OFF F SMC URL http://www.smcworld.com 2008-2014 SMC Corporation All Rights Reserved No.PS-OMM0002CN-F

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual