Special Applications: Clean Series, Body Size: 30, Reverse Flow: Reverse Flow Mechanism, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: B [Bracket (Size 20 to 60)], Option: 1+Z
Special Applications: Clean Series, Body Size: 30, Reverse Flow: Reverse Flow Mechanism, Thread: Rc, Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: None, Option: Right to Left Flow Direction
Special Applications: Clean Series, Body Size: 30, Reverse Flow: Reverse Flow Mechanism, Thread: NPT, Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: 1+Z
Shock Absorbers and Rate Controls (I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ? M l { x 1 . 5 J.J /A 1.2 71.4 0.9 t4.2 N/A r2.0 12.1 (r.R)0Efti.35rJr(Bl 100,6 0.7 l l 6 x 1 . 5 4.0 N/A ).2 87.4 1.2 t4.5 0.5 t4.0 12.7 l0 [.5t](B] 9E_6 I t 0,5 [!
Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)
L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14
B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position
A part z1 m1 = 40 X 7 X 8 X 2.7 X 10-6 Calculation of weight m1 = a X b X c X Specific gravity = 0.006(kg) Iz1 = {0.006 X (40 2+7 2)/12} X 10-6 Moment of inertia around Z1 axis = 0.8 X 10-6 (kgm 2) = 0.8 X 10-6+ 0.006 X 37 2 X 10-6 Iz1 = {m1(a 2+ b 2)/12} X 10-6 IA = 9.0 X 10-6(kgm 2) Moment of inertia around Z axis IA = IZ1 + m1r1 2 X 10-6 z r2 Z2 B part r2 = 47(mm) m2 = 5 X 10 X 12 X
LC (Knock pin position) W Y M X LX LZ Z LS + Stroke ZZ + 2 Stroke 4-LD (mm) 7 7 6 6 LD 4 4 4 4 LC 30 25 22 20 LH 16.5 16 15 15 X 60 69 69 69 LS 4 3.5 3.5 3 M 3 3 3 3 LT B 8.5 8 7 7 Y 10 10 10 10 W 54 44 36 32 LX 187 175 173 163 ZZ 71 58 49 44 LZ Z Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 With air
MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24
One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 12 3 3 X 49.5 B B B B B B B B P X P12 30 25 1 A 1 A A A A A A A 13.5 10 (12) (7.5) 25 C10: 10 One-touch fitting C10 [1(P) SUP port] P = 16 45 C4, C6, C8 [4(A), 2(B) port
B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when workpiece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when workpiece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the workpiece for a few times. The optimum values will be set automatically.
Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st
Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st
Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches
7 7 7 6 6 B D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL Proper Auto Switch Mounting Position/ Auto Switch Mounting Height 6 6 5.5 5 5 D-G39/K39 D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL 10 10 10 11 11 Common for each auto switch Since this is a guideline including hysteresis, not meant to be guaranteed.
-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15
A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)
64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35