CYV Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.
40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy Duty Stopper Cylinder Series RSH Operation Guide Precautions qAdjustment of shock absorber capacity (50 to 80) When a transported object is to stop softly loosen the set screw (M4) on the stopper section, turn the adjustment dial to set the energy absorption value for
System Error If the error can not be reset after the above measures are taken, then please contact SMC. -54NO.TQ1050188-OM002 Specification Specifications Rated pressure range 100 to -100 kPa Set pressure range 105 to -105 kPa Proof pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (Protected against reverse
ZQ-OM01501 Specification Specifications Rated pressure range 100.0 to -100.0 kPa Set pressure range 105.0 to -105.0 kPa Proof pressure 500 kPa Min. display unit 0.1 kPa Applicable fluid Air, inert gas and non-flammable gas Power supply voltage 24 VDC 10%, ripple max. 10%pk-pk (with polarity protection ) Current consumption 40 mA or less Switch Output NPN or PNP open collector OUT1: General-purposeOUT2
System Error If the error can not be reset after the above measures are taken, then please contact SMC. -53NO.ZL3-OM00701-A Specification Specifications Rated pressure range 100.0 to -100.0 kPa Set pressure range 105.0 to -105.0 kPa Proof pressure 500 kPa Min. display unit 0.1 kPa Applicable fluid Air, inert gas and non-flammable gas Power supply voltage 24 VDC 10%, ripple max. 10%pk-pk (
System Error If the error can not be reset after the above measures are taken, then please contact SMC. -50No.TQ0010298-OM003-B Specification Specifications Rated pressure range 100.0 to -100.0 kPa Set pressure range 105.0 to -105.0 kPa Proof pressure 500 kPa Min. display unit 0.1 kPa Applicable fluid Air, inert gas and non-flammable gas Power supply voltage 24 VDC 10%, ripple max. 10%pk-pk
2.67 27 54 270 230 1 1/2 Short 1.10 to 3.29 45 90 270 230 2 Middle 0.68 to 2.05 45 90 Component Parts IF33-10 500 420 2 1/2 Middle 0.74 to 2.30 80 160 Material No.
rated voltage Allowable voltage fluctuation Coil insulation type Class B 500 VDC, 10 M or more Insulation resistance Voltage limit 1800 VAC, 1 sec., 3 mA or less Simulation noise: 500 Vp-p (Based on 1 sec. pulse width, 50 10 Hz frequency noise simulation) Noise tolerance Note 3) Fast transient noise: IEC61000-4-4: 1 kV VDW30: 3 W (With 0.5 W power-saving circuit) VDW40: 6.5 W (With 1 W
Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
(mm) 4 4 6 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4 2.6 2.8 3.0 3.2 3.4 3.6 T0425 T0604 Tubing I.D.
A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108
L/min 10 L ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L -14No.PF-OMM0004-D ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2
HW/SW mode setting (switch No.10) The setting is as follows.
ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.
600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics
ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.
to 60C (with no freezing or condensation) Operating temperature range EnvironOperating humidity range mental Operating and stored: 35 to 85%RH (with no condensation) Withstand voltage resistance 1000 VAC for 1 min. between live parts and enclosure 50 M or more between live parts and enclosure (at 500 VDC Mega) Insulation resistance 10 to 500 Hz, 1.5 mm or 98 m/s2 amplitude in X, Y, Z directions
System error Brown DC(+) Internal data error 12 to 24 VDC + Black OUT Load Internal data error Blue DC() 16-2-9 10 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 30 9.5 25 8 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA
OFF: Aulo currenl down lunction olt OFF Half step Fullslep Felease Seftng Aulo current down; Funclion lo automatically reduce 50% Of current output 10 moor when stopped.