F/ISE

ZSE50F / ISE50 1 x 10 -5Pam3/s ZSE60F / ISE60 1 x 10 -10Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of work pieces containing water To confirm primary pressure of cleaning line Features 1 High precision and high resolution 1/2000 (0.1kPa) Positive

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Hand Valve Series VH 1

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

LFE-OMY0008

L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 16 No.LFE*-OMY0008 FR0( FR0( FR0( FR0( ) ) ) ) FR1 FR1

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

Low torque Metal seal type Rotary joint Series MQR

#$% 45 " ! #$%& Series MQR & ' !" # $%" # " ) " 4.1 " ( & $ ' # $ % & $ ' ! 4.1 ( # $ % ( 30h8 & * # $ % ( ) ) & ) ) * * + * + * ) + ) + ) ) 25H8 30H8 45 45 +45 +30 ) 22.5 ) * ) %" " # $ % ( $ ' $ ) ' $ $ ' $ $ ( ' , ) * * ) !" $%" # $ % $ # $ % $ ' $ $ $ ( ' , ) ' $ 45 45 )

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K11 1 KL2 70 169'59' t32 222 3S 0 364 CKIA-40-75Y, 5O-7SY, 63-75Y CKA40-40209 167' 75 QKA4040210 177 75 45 90 183'58' 1421232 0 399 ICKIA40-100Y, SOI00Y, 63100Y CKA4040211 202 1 85 140.108'55" t67 267 70 10 484 CKIA40-1'YJY, 50-150Y.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

How to Order Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications: VT/VO317V) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector

Refrigerated Air Dryer For Use in North, Central and South America

Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) GWP: 20887 Refrigerant charge [oz (g)] 13.7 0.4 (390 10) 18.7 0.4 (530 10) 22.2 0.4 (630 10) 27.5 0.4 (780 10) Auto drain Float type (Normally open, Min. operating pressure: 14.5 psi (0.1 MPa)) Port size Symbol N NPT1 NPT1 1/2 NPT2 Symbol Nil R1 R1 1/2 R2 Drain tube O.D.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Air cushion, Operating Pressure(MPa): 0.1 to 0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Without magnet, Auto Switches: Without

Clean Series: 10 (Relief Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 16mm, Stroke: 100mm

Clean Series: 10 (Relief Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 16mm, Stroke: 15mm

Clean Series: 10 (Relief Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 16mm, Stroke: 150mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction)

Clean Series: 10 (Relief Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 16mm, Stroke: 30mm

Clean Series: 10 (Relief Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 16mm, Stroke: 60mm