MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

VEX-OMY0001

DC + 3) 1) 0.5Nm20% 180 AC DC o (DIN ) DIN DIN B1B09-2A () GM209NJ-B17 (CE ) (DIN ) 10 No.VEX-OMY0001 1) 2) 3) 1.351.45Nm P8,9 02 03 04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

HRX-OM-S004

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

HRX-OM-W032

10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

MGG

BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 6 8 10 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.

Vacuum Gripper

UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2

Compact Vacuum Unit Ejector/ Vacuum Pump System

(N.C.) port Port size Rc1/8 Supply from one side 10 NPT1/8 12 12 Supply from both sides 12 G1/8 Supply from one side 10 8 10 M50.8 Supply from both sides 12 10 12 Note) The number of stations shown above is to satisfy the specifications of the ejector performance at the standard supply pressure.

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

NCA1

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

HRX-OM-R026

HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series

pa

10 VX 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find the pilot air pressure and pilot air consumption for a discharge rate of 6 l/min and a total lifting range of 25 m.

High Power Cylinder Series RHC

area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

D

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.