Multistage Ejector (N)ZL Series

Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent

Low Differential Pressure Sensor

P-1 = A (A B) / 4 H-1 = (A B) / 2 A = Maximum pressure value B = Minimum pressure value For low differential pressure For low pressure For compound pressure PSE533 PSE543 PSE563 For positive pressure For vacuum Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers displayed.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

PSE550/300

Work 1 Work 2 Work n Atmosphere A = Maximum pressure value B = Minimum pressure value P-1 = A (A B) / 4 H-1 = (A B) / 2 For compound pressure PSE533 PSE543 PSE563 For low differential pressure For low pressure For vacuum For positive pressure Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers

TA301

Cv b Cv b Cv b Cv Grommet VTA315 1.6 0.30 0.39 1.7 0.39 0.45 1.9 0.38 0.49 1.7 0.36 0.45 0.16 VOA315 1.4 0.12 0.33 1.2 0.18 0.29 1.5 0.16 0.35 1.2 0.13 0.28 Construction/Dimensions Precautions Breathing port of diaphragm Pilot port Rc 1/8 Be sure to read before handling.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

Guide Table Series MGF ø40, ø63, ø100 1

hole for guide (with element) 46 Port for retracting cylinder 4-M12 x 1.75 through M6: T-slot for hexagon bolt K 70 170 4 200 190 11 6-K (6 places) 93 186 8-23-12 13 Guide Table Series MGF Operating Range Proper Auto Switch Mounting Position (Detection at stroke end) Auto switch model Bore size (mm) 40 63 100 10 10 10 D-Z7/Z80 D-Y59, D-Y69 D-Y7P/Y7PV D-Y7W/Y-7WV 6 6 6 B A 5 5 5 D-Y7BAL

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(A) 2 Manual override 1 None 1 (P) B (1) Locking style (Slotted style) Note) Consult SMC if N.O. type is desired Note 1) Only normally closed DIN connector in-line style is applicable.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Air Cylinder NCM Series Stainless Steel Cylinders

rod 3A'.%', Stainless Sieel 1%'.1t4 .1Yz' Cabon Steel Hard Chrorne Plated o Alshing sjnted BR Reblriru drE Spdng Sleel o Eanper Uretnane o Rod seal NBR o Piston s6al NBR enrtrk* NBR Dimensions (inch ZB+(2Stroke) B-DIA Pilot B-OIA Pilot Bore (inch) MM KK B u E K LB N HN YE za o75 l%l 0.250 Ya-24 0.50 o.624 0.86 3.00 0.75 %-B 0.s0 0.45 4.00 088 l%l 0.250 %-28 0.50 o.624 0.93 2.91 0.75 Ve-18

5 Port Solenoid Valve Series SQ1000/2000

A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21

HEC_W-E

HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig

PSxx-OMR0001CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

port 1 24 2 60 (69) 18.5 34 D-97/93A 15 30 11-5-11 11 Series MSUA These drawings indicate the condition when the B port is pressurized.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

Rodless Cylinder for Vacuum Series CYV ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis