NCA1

/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA

NCA1

/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA

COQ2BP

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B 210.5 198 185.5 173 160.5 148 135.5 123 110.5 98 L dimension 53.3 50.1 46.9 43.8 40.6 37.4 34.3 31.1 28 24.8 Weight (g) A 19 18 17 16 15 14 13 12 11 10 No. 335.5 323 310.5 298 285.5 273 260.5 248 235.5 223 L dimension 84.9 81.7 78.6 75.4 72.2 69.1 65.9 62.7 59.6 56.4 Weight (g) Series For SY3000 (8) A 16 22 25 25 C 51 80.8 97 98 Model AN203-KM8 AN200-KM10 AN300-KM10 AN300-KM12 Effective

10

How to Order Specifications Symbol -X86 -X86A Bore size [mm] 25 25 X86 Standard model no.

reduces flow setting time

) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FS-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-09 (S) 5/16"

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S)

XL-OMY0001

30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257

CE

, 50, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

MRQ

30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body installed

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 7 12.7 9.6 12.3 28.6 25.8 25 22.2 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 17.3 17.3 3.2 22.1 8.4 22.1 9.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 28.6 25.8 25 22.2 21.3 26.1 4 7 9.6 7 16.5 8 11.4 9.3 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 25 22.2 9.6 AS121F-M5

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAU23-M5 38 9.6 15.5 34.5 9 M5 0.8 M6 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 1 8 KAU23-M6 KAU23-U01 11 9.6 KAU04-M5 M5 0.8 M6 1.0 39.5 4 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 KAU06-M5 M5 0.8 M6 1.0 42.5 39 2.2 2.2 13 KAU06-M6 43 13 17 1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 14 6 Uni thread 1 4 KAU06-U02 39

Multi-Axis Step Motor Controller

Refer to the dimension drawings on pages 7 and 10 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimension No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423

OMR0031

CN5: Parallel I/O Connector . 25 7.1 Parallel I/O connector specifications . 25 7.2 Parallel I/O specifications . 25 7.3 Parallel I/O circuit (NPN, PNP) . 25 (1) Parallel I/O input circuit . 25 (2) Parallel I/O output circuit . 26 7.4 Parallel I/O signals (Step Data input type) . 27 7.5 Parallel I/O signal cable (Step Data input type) . 31 7.6 Parallel I/O connector wiring (example) . 32

XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

Thermo-chiller

18 18 Facility water temperature 90F (32C) 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 6 Facility water temperature 104F (40C) 6 Facility water temperature 104F (40C) 4 4 0 2 0 2 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] 11

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY