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Mounting Wiring/Piping Caution Warning 11. Transition wiring of ionizer For transition wiring of ionizers, use a transition wiring cable for connection between ionizers. Use a power supply cable for connection between ionizer and power supply or external equipment. (Transition wiring is not possible with the IZS40.)

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

N.O. 140 (80) 1/8 Base mounted (with sub-plate) 135 (75) 136 (76) 157 (97) 1/4 Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate. External Pilot SYJ700R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Series MXP Precision Air Slide Table

Heat treatment 1 Stainless steel Body Heat treatment 2 Stainless steel Table 7 1 2 8 9 6 13 12 11 3 Resin Cover 4 Resin Return guide 5 Scraper Electroless nickel plated 6 Brass Piston Electroless nickel plated 7 Carbon steel Joint shaft Electroless nickel plated 8 Brass End cap 9 Polyurethane Rod bumper 10 Steel ball High carbon chrome bearing steel Electroless nickel plated 11 Plug Brass

17

Applicable cylinder MY1B25 MY1B32 MY1B40 75 84 105 A B MY-S25 35 50 8 11.7 5 6 9.5 5.5 M6 x 1 MY1H A B MY-S32 45 64 11 6.6 M8 x 1.25 MY1 HT Side supports consist of a set of right and left supports. MY1 W Guide to Side Support Application MY2C For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75

AR20-B to AR60-B

13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

Air Cylinder CP Series Cylinder Positioner Assembly

5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

Title not found

5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

XL-OMY0003

55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O 11 XL-OMY0003 6-3 1 2 O O 3 4 3 O 2 1 4 O O O O O O O O O O O 12 XL-OMY0003 5 O O 6 b 3 1 2 a Nm 4 b Nm 0.3 XLH-16 0.7 -25 1.5 -40 2.5 -50 6 a bbO a 13 XL-OMY0003 Revision

Dedicated Controller Series LC1 Uniaxial Type

BUSY (11) Operating signal COM +24V 1 COM 11 GND NO.0 When this signal is off, an alarm is being generated for the actuator/controller.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Series PB1000 Built-in Solenoid Valve Type/Air Operated Type Dimensions/Built-in Solenoid Valve Type/Air Operated Type (mm) 1in = 25.4mm PB1000 FLUID OUT 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PA3000/5000/PAX1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

70pvpump

Circuit example/Built-in solenoid valve Ball valve Regulator FLUID OUT AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 17-5-166 27 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Dimensions PB1000 FLUID OUT Rc 1/8 VC 11 OUT VDW 11 VQ 84 72 VX2 Mount with this surface (out port side) on top 7.5 41 60 45 VX Courtesy

ZR

With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

Air Cylinder CLA Series Fine Lock Model

11 100+55!fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

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11 100+55!fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!