Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor, Step Data Input Type

IDX-OM-W026

M 11 M 11-1 ( ) IDF Series 11-1 11 1 IDX-OM-W026 11 M 11-2 ADM200 IDF22E-**-M IDF37E-**-M IDF55E-**-M IDF75E-**-M IDF-S0090 1.0MPa 1 1 2 / AC200V(50/60Hz) 4W (10, 0.95m) (10, 0.95m) 11-3 (1 1 )() 11-4 M 6-4 6-3 T 13-6 13-3 IDF Series 11-2 11 2 IDX-OM-W026 12 R 12 R 12-1 12-2 1 AC100V AC200V INOUT IDF22E/37E/55E-**-R 10A 30mA IDF75E-**-R 15A 30mA IDF Series 12-

2/3 Port Valve

15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 43 29 43 29 28 19 28 19 18 11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320

HRX-OM-W032

Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-10 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No. 6 Flow switch Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No.

HRX-OM-W038

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-O021

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-R005

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit 12 Changing pressure unit Pressure unit can be changed.

Microspeed Cylinder

(MPa) Bore size (mm) 0.035 (0.025) 1 (0.5) 0.04 (0.03) 20, 25, 32, 40 0.025 0.5 0.035 (0.025) 1(1) 0.03 0.025 1 Figures in ( ) are for 11-CM2X. 12, 16 20, 25, 32, 40 12, 16 1(0.5) 0.5 20, 25 20, 25 Figures in ( ) are for 11-CQSX. 1MPa = 145psi 1in/s = 25.4mm/s II Microspeed Cylinder/Double Acting: Single Rod Series CJ2X 10, 16 The dimensions are the same as the standard double acting single

Stopper Cylinder

13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

MY1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50

Direct Solenoid

Choo6e Manffold Block porling desired. e.g. # 11, # rg or # 15. 4. To specify a valve hountsd on a manitold blo,ck Inlen manilold numbr into valv numbr i.e. NVS 411+tt09D b a NVS 4114-0O0gD valv6 ,nount6d oo a # 11 blc'*,. 5.

COQ2BP

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S