1

G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st or less Over 75 to 175st Over 175 to 275st Over 175 to 275st Over 275st Over 275st 11 7.5 Rc1/8 32 15 34 30 96 44 110 78 98 63 124 200 300 83 121 171 45 48 32 11 7.5 Rc1/8 38 18 38 30 104 44 118 86 106 72 124 200 300 84 122 172 46 48 40 14 9 Rc1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174

AC Servo Motor Driver (Pulse input type)

Configuration Minimum equipment and wiring requirements to get started 1 Provided Ex) 200 V AC (*1) by customer 6 5 Provided 1 by customer 7 2 3 (-) PC 1 2 4 (+) 8 C D 11 21 9 U 2 Electric Actuators Ex) LEF V W Provided by customer 3 10 (*1) Refer to LECSB Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSB*-S* 2 Motor cable LE-CSM-*** 3 Encoder cable LE-CSE-

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Furthermore, when mounting supply/exhaust block assemblies on both sides of type B with a 2 to 10 station manifold, calculate the weight W using the formula for 11 to 16 stations.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

123 L1 L2 L3 L4 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5X3-45GUBC4 C6 Stations 2 3 4 5 6 7 8 9 10 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223 L1 L2 L3 L4 137.5 162.5 187.5 171 13.5 212.5 192 15.5 118.5 14.5 139.5 16.5 160.5 12.5 181.5 14.5 Stations 11 13 14

CG5-S

27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 93 149 44 to 500 50 1/4 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 109 176 55 to 600 63 1/4 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 109 176 69 to 600 80 3/8 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 130 210 80 to 750 100 1/2 40 37 41 125 60 30

Stroke Reading Cylinder and Counter

, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60

Modular F.R.L. Unit

115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

1MPa: Approx. 10.2kgf/cm2 0.2MPa 0.2MPa 100 100 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm MHS2-63D MHS2-63D Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi Pressure 0.6MPa Pressure 0.6MPa 600 600 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 400 400 0.3MPa 0.3MPa 0.2MPa 0.2MPa 200 200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm

XM, XY

Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperatures, excluding gas permeation (Standard material: FKM) External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time (s) Initial

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi

Stopper Cylinder

13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.