Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

1

Refer to pages 11 to 13 for cylinders with auto switches.

Compact Guide Cylinder

Refer to pages 10 and 11 for cylinders with auto switches.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Type adjustable by flat head screwdriver Body size 100 200 205 300 400 M5 standard Made to Order Refer to page 591 for details. 1/8 standard 1/4 standard Applicable tubing O.D. Note) 3/8 standard Metric size Inch size 1/2 standard 3.2 01 03 05 07 09 11 13 23 04 06 08 10 12 1/8" 5/32" 4 Caution 3/16" 6 With One-touch fittings 1/4" 8 Be sure to read before handling.

Compact Type

counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

VP4

Made to Order Specifications (For details, refer to page 3-6-11.)

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Series PB1000 Built-in Solenoid Valve Type/Air Operated Type Dimensions/Built-in Solenoid Valve Type/Air Operated Type (mm) 1in = 25.4mm PB1000 FLUID OUT 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

Tamper Proof and Flat Head Screw

(Part no.: AS-T-1) 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D. 1/4 standard Metric sizes 23 04 06 08 10 12 Inch sizes 3/8 standard 3.2 01 03 05 07 09 11 13 1/8 1/2 standard 4 5/32 6 3/16 With One-touch fitting 8 1/4 10 5/16 12 3/8 1/2 Use 1/8 tubing.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

50 ms 40% Reference condition*11 Select from Standard condition (STD) or Normal condition (NOR).

AMD

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57

MHL2

300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3

Process Pump

SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4