MXW

MXW-A1212-X11 33.5 15 MXW-A1612 28.5 5 MXW16 10 M6 x 1 3 8 MXW-A1612-X11 15 38.5 MXW-A2012 5 34.5 MXW20 13 M8 x 1.25 4 10 15 MXW-A2012-X11 44.5 5 MXW-A2512 40 1 mm 1 mm Stroke MXW25 17 M10 x 1.5 5 14 15 MXW-A2512-X11 50 8-7-8 9 Long Stroke Slide Table Series MXW Precautions Shock Absorber Adjustment Specifications Caution RB0805 -X552 RB0806 -X552 RB1007 -X552 RB1412 -X552 RB2015 -X552 Shock

MHF2

) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x

MHF2

x 0.5 thread depth 4 Mounting thread 50 Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3 15 26 12 4 Accessory option: Hexagon socket head screw (special screws) 3 3 2-2H9 +0.025 0 depth 2 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 12-3-14 15 Series MHF2 Low Profile Air Gripper Dimensions MHF2-12D 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x

Pin Clamp Cylinders

11 15 15 538 Pin Clamp Cylinder Plate Cylinder Type Magnetic Field Resistant Auto Switch/Small Auto Switch Mounting C(L)KU32 Series Dimensions CKU32 (Clamping height LOW type) * Refer to How to Order for positional relationship of the mounting surface and port. * The figures below indicate the CKU32-lRAL-X2321. 14.50.1 14.50.1 (29) 27 70 D d Q Q 0 0.05 120 K C SR 87.5 45 15.5 14.5 26 (4)

PC Wiring System Series PCW

15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4 CN7 1

Ionizer

80 30 30 15 220 180 30 26 26 2 x 5.4 11 11 20 32 22 4.5 High-voltage unit full length: 220 mm High-voltage unit full length: 180 mm 31 (Full length of high-voltage unit and control unit) (Full length of high-voltage unit and control unit plus 62 mm) With bracket How to Order IZS31 180 X210 R Sensor Bar type Without bracket With bracket Note) Nil Bracket Without sensor Autobalance sensor

Hydraulic Cylinders

depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50 45 21 106 17 142 3/8 36 15 Note

Modular F.R.L. Unit

Threads for IN and OUT ports are not machined. 40 40 28 11 11 AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 1/8, 1/4 AKM2000 53 48 34 14 13 1/8, 1/4 AKM3000 70 54 42 18 15 AKM4000 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

MTS

32 32 (47) 0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Do not use a shock absorber together with air cushion. 2000 1500 Collision speed (mm/s) L unit Air Cushion Stroke 1000 Air cushion Bore size (mm) Cushion stroke 500 400 300 16 12 20 15 25 15 200 32 19 1002 3 5 10 20 50 40 24 30 100 4 50 30 Load weight (kg) 63 37 8-12-10 11 Model Selection Series MY1W Cushion Capacity Tightening Torque for Stroke Adjusting Unit Holding Bolts (Nm) Precautions

80

15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 2 x J thread depth K VCH VDW VDW Body material Stainless Steel SX10 2 x 3.4 Mounting hole W Y Grommet VQ LVM X U D 300 Q F Full wave rectifier (AC type) [mm] C R E G Mounting method Model Port size P A B B1 C D E F J K M VDW1 M5 12 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 15 22 11 51.7 20 8 13.5 M3 5 15 B B1 2 x P Port size A Mounting bracket

IDX-OM-W014

R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i

IDG

(Refer to page 14-19-11.)

AC Servo Motor Driver (SSCNET /H Type)

Wiring 8 3.1 Wiring for power supply . 8 3.2 SSCNET cable wiring . 9 3.3 I/O signal connection . 10 3.3.1 Sink I/O interfaces Connection example . 10 3.3.2 Source Sink I/O interfaces Connection example . 11 4. Axis No. settings 13 5. Parameter list (Driver side) 15 6.

High Vacuum Angle Valve

55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Compact Cylinder with Air Cushion Series RQ

Hs A Auto switch mounting height mm Proper auto switch mounting positions mm D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9V D-F9WV D-F9BAL D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 25 22 25 9.5 3 13.5 7 12.5 6 24.5 27 24 20 32 11 5.5 15 9.5 14 8.5 27 29 26.5 25 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 32 50 17 7 21 11 20 10 36.5 38.5 36 40 17 12.5 21 16.5 20 15.5

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY