EX600-DX_DY_DM_eng

The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED

Rotary Table

MSQB-OM02-A PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQB1,2,3,7 Contents 2 Safety Instructions 18 Outline 18 How to order 19 Specifications 19 Weight 19 Effective torque 20 Internal construction and parts 20 MSQ1 to 7 21 Basic circuit 21 Circuit structure 21 Recommended models 22 Mounting 22 Load restrictions 22 Unit used as flange mount 23 Direction and Angle of Rotation

LEF-OM006xx

1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm

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M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting

SYA3000/5000/7000

46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743

5 Port Air Operated Valve SYA3000/5000/7000 Series

22.5 2 position single 11.5 13.5 SYA714002 03 57 77.5 42 10.4 61 M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 69 6.4 2 x 4.3 (For mounting) 87.5 1.8 (Ventilation hole) 26.5 13.5 20.5 20.5 3/8, 1/4 (P , EA, EB port) 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 42 61 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P

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M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting

NCQ8

B Through screw clearance hole / NC(D)Q8WN (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E 4-E 0.20 0.25 0.25 0.34 0.34 0.41 21 Compact Cylinder Single Acting, Single Rod Bore size: 056 (9/16), 075 (3/4), 106 (1-1/16), 150 (1-1/2), 200 (2), 250 (2-1/2) Series NCQ8 How to Order Without auto switch B 056 025 S NCQ8 B 056 025 S M9B S NCDQ8 With auto

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 21 LPM , 21 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 22.7 in HgV / -770 mbar , 22.7 in HgV / -770 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 5.91 in / 150 mm Width: 1.89 in / 48 mm Height: 1.89 in / 48 mm , Length: 5.91

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

+0.030 4H9 0 depth 4.5 K cross view (Closed) +0.052 32H9 0 depth 1.5 Auto switch mounting groove (4 locations) 76 Width across flats 13 (4 locations) M5 x 0.8 (Finger closing port) 2 x M5 x 0.8 Vacuum port M5 x 0.8 (Finger opening port) H 4 x M8 x 1.25 (Piston rod thread and rack thread) 33.2 11.5 6.5 12 16 16 16 1 27 18 O S 12 23.5 52 29 K (81) 18.5 38 12 29 29 14 4 4 14 40 When open F 21

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

AME

10 14 9 90 55 110 50 88 3.2 1 , , , 1 1 3 4 4.5 4.5 6 257 314 406 30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

Air Tank Series AT 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for Precautions on every series. 3BJIS10KFF 4BJIS10KFF Note) The accessories should be mounted by user. How to Order Caution on Design HA AT 22C 14 Caution AT 1. Use outside Japan is not allowed.

RB/RBL/RBQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Ambient temperature range (C) 10 to 80 (No freezing) Extended 1.96 1.96 4.22 4.22 6.86 6.86 8.34 8.83 Spring force (N) Retracted 3.83 4.22 6.18 6.86 15.30 15.98 20.50 20.01 Basic type 15 15 23 23 65 65 150 350 With cap Weight (g) 16 16 25 25 70 70 165

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.

Electromagnetic Digital Flow Switch

Magnetic flux density (B) 1 Flow Switch for Fluid Variations Rated flow range [L/min] Smallest settable increment Detection method Enclosure1 Display Applicable fluid Series 2 0 0.5 5 10 20 30 40 50 100 200 150 250 LFE 0.1 L/min 0.5 20 Water, Water-soluble coolant Electromagnetic IP65 3-color display 0.5 L/min 2.5 100 5 200 1 L/min PF3W 0.01 L/min 0.5 4 0.1 L/min 2 16 Water, Ethylene glycol