Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

S 1 pc. 22 Vacuum suction type n "n" pcs. Symmetric type Nil Standard Auto switch L Symmetric Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

CJ2X/CUX/CQSX/CQ2X/CM2X

Mounting style B L F D Basic style Axial foot style Rod side flange style Double clevis style L 16 60 CJ2X Without auto switch CDJ2X L 16 60 H7BW With auto switch Number of auto switches Low speed cylinder Auto switch 2 pcs. 1 pc. n pcs. Built-in magnet Nil S n For the applicable auto switch model, refer to the table below.

CJ2X/CUX/CQSX/CQ2X/CM2X

CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators M5 x 0.8 Relief port (10-, 21-) Vacuum port (11-, 22-) GC GB X 2 x LD 2 x P (Rc, NPT, G) GA H1 Y Width across flats B1 I NDh8 D B LH N MM Width across flats KA L LX H K A AL 3 ZZ + Stroke S + Stroke N Thread depth A1 Female thread MM (mm) Female Rod End A1 10 10 10 10 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MM 86 86 88 114 ZZ Bore size 8 8 12

3 Port Solenoid Valve Metal Seal Series VZ200 1

118 4 75 86 3 59 70 2 43 54 Symbol L1 L2 Common exhaust: VV3Z2-30 (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

Microspeed Cylinder

Mounting B L F D Basic type Axial foot type Front flange type Double clevis type L 16 60 CJ2X Without Auto Switch With Auto Switch CDJ2X L 16 60 C73 Microspeed cylinder Number of auto switches With auto switch (built-in magnet) Auto switch type Select an applicable auto switch model number from the table below. Nil S n 2 pcs. 1 pc. "n" pcs.

MHF2

External Gripping Internal Gripping MHZ MHF MHL L L F F MHR MHK MHS MHF2-12D MHF2-8D MHC 70 Pressure 0.7MPa MHT 30 60 Pressure 0.7MPa 0.6MPa MHY 0.6MPa 50 Gripping force N Gripping force N 0.5MPa MHW 20 0.5MPa 40 0.4MPa MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 0 0 80 40 30 20 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa

MHF2

MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 40 30 20 10 0 0 80 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping

E-P HYREG

Port 1 (P), 2 (A), 3 (R) 3 x M5 Silencer (Option) VY1A0 0 1 Applicable cable O.D. 4 to 6.5 Connection mark All types are the same in terms of connection. (VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.)

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

Slide Tables MX Series

Front Mounting Top Mounting Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) l 5.5 7.5 10 11 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 l 6.5 8 9 9.5 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Work piece mounting Work pieces can be mounted

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Fieldbus System

Dimensions n: Stations (Maximum 16 stations) (mm) 1 L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 234 L1 L2 131 156 181 206 231 256 281 306 331 356 381 406 431 456 481 506 209 259 284 309 334 359 384 409 434 459 484 509 534 559 584 47 For Series EX600 Series VQC4000 Dimensions (mm) Power supply with 7/8 inch connector L2 16.5 L1 5.5 47 m + 86 Communication connector Digital Output Unit (n 1)

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

LJ1H

F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult SMC.

Intrinsically Safe Valve

plug connector (L) 53-SY5140(R)-L-02 18 19 9.5 60.3 8.3 48 37.2 2 x 4.3 (For mounting) 15.5 15.5 M5 x 0.8 (External pilot port) 4 Insulator: Black () B A 17.5 35 B A Insulator: Red (+) PE X P EB EA Manual override 17 4.3 56 17 62.5 65 M5 x 0.8 (Pilot EXH port) 109.1 L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 66.5 (E-type) 28 5 x 1/4" (Piping port) L-type plug

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5