Speed Controller with One-touch Fittings Series AS In-line Type 1

32 35.6 40.6 9.8 71.6 18.5 10 21 42 33.3 38.3 7.4 59 13.2 17 1/4" AS3001F-07 AS3001F-12 33 36.8 41.8 11 76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F

5 Port Solenoid Valve Series SV

30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding

Digital pressure switch for energy-saving control ejector

(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

CU

50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20

Stations: 12, A,B Port: 1/4, Thread: NPTF

Stations: 05, A,B Port: 1/4, Thread: NPTF

Stations: 04, A,B Port: 1/4, Thread: NPTF

Stations: 08, A,B Port: 1/4, Thread: NPTF

Stations: 07, A,B Port: 1/4, Thread: NPTF

Stations: 14, A,B Port: 1/4, Thread: NPTF

Stations: 15, A,B Port: 1/4, Thread: NPTF

Stations: 17, A,B Port: 1/4, Thread: NPTF

Stations: 18, A,B Port: 1/4, Thread: NPTF

Stations: 03, A,B Port: 1/4, Thread: NPTF

Stations: 06, A,B Port: 02 (1/4), Thread: T (NPTF)

Stations: 12, A,B Port: 02 (1/4), Thread: T (NPTF)

Stations: 05, A,B Port: 02 (1/4), Thread: T (NPTF)

Stations: 04, A,B Port: 02 (1/4), Thread: T (NPTF)