Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 24 Series SYJ500 Type

Modular Type Lubricator Series AL

70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 53 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 F W X10 NA 1 G Cable entry direction Top entry Cable entry direction Power supply voltage Switch Motor specification Matsushita Electric Industrial Co., Ltd.

One-touch Fittings Series KQ2

D L M Weight (g) A Nylon Urethane M5 0.8 12.7 3.4 2.9 KQ2H23-M5 KQ2H23-01S KQ2H23-02S KQ2H04-M5 KQ2H04-M6 KQ2H04-01S KQ2H04-02S KQ2H06-M5 KQ2H06-M6 KQ2H06-01S KQ2H06-02S KQ2H06-03S KQ2H08-01S KQ2H08-02S KQ2H08-03S KQ2H10-01S KQ2H10-02S KQ2H10-03S KQ2H10-04S KQ2H12-02S KQ2H12-03S KQ2H12-04S KQ2H16-03S KQ2H16-04S 2 9 16 2.4 2.5 9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) Soft PBT (UL94 V0) PA66 (UL94 V0) TPU (UL94 HB) Material Material of sheath (Sheath color) PUR (Purple (RAL 4001 equivalent)) PVC (Light blue) Weight Approx. 308 g Approx. 306 g 1 m: Approx. 100 g 5 m: Approx. 355 g Approx. 47 g Approx. 53

KR

22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 30 30 Reference dimensions after R thread installation. 15.5 17 1 4 17 10.4 14 27 21 19 26 19 14 17 6 5.6 Applicable tubing 3 8 1 8 KRH06-03S 24 26.1 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 14 1 4 3 8 1 8 1 4 3 8 20.5 15.5 26 27.5 22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53

Table of Contents

Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to pages 17-5-53 through 17-5-55 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

VM

Push Button (Mushroom) Push Button (Extended) Push Button (Flush) Twist Selector (2 position) Key Selector (2 position) Twist Selector (3 position) Foot Pedal Push-Pull P3.5-7 P.3.5-11 P3.5-19 Effective Area (Cv) Number of Ports 1 (0.055) 2, 3 Poppet 2.5 (0.14) 2, 3 19 (1) 2, 3 Poppet Poppet Function 3.5-1 Series VM Mechanical Valve SlA VlA VM400 VZM500 VZM400 VFM300 VFM200 VM800 21 X 35 X 53

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port Size: C8 (ø8 One-touch Fitting, Metric)

Actuation: 2 (2-Position Double), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: C8 (ø8 One-touch Fitting, Metric)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port Size: C8 (ø8 One-touch Fitting, Metric)

Actuation: 2-Position Double, Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø8 One-touch Fitting, Metric, Thread Type: -, Bracket: -

Actuation: 3-Position Exhaust Center, Electrical Entry: L-type Plug Connector, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port Size: ø8 One-touch Fitting, Metric, Thread Type: -, Bracket: -

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 10 (1000mm), Manual Override: Non-locking Push Type, A,B Port Size: C8 (ø8 One-touch Fitting, Metric)